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- W2013794333 abstract "minimum193nm lithography is described in this paper. The polymer used in this DBARC is insoluble in the casting solvent of the resist, which is propyl eneglycolmonomethyleth eracetate (PGMEA). Photo acid generator (PAG) and base extractions from the DBARC coating by the resist casting solvent were examined by the DBARC dissolution rates in the developer, before and after solvent treatments. Although the resist and the DBARC do not appear to intermix, strong interaction between the two is evident by their lithographic performance and dissolution rate study. Key words: Developable BARC, dissolution rate, extraction, 193nm lithography, interlayer mixing" @default.
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- W2013794333 date "2007-03-16" @default.
- W2013794333 modified "2023-09-23" @default.
- W2013794333 title "Radiation sensitive developable bottom anti-reflective coatings (DBARC) for 193nm lithography: first generation" @default.
- W2013794333 doi "https://doi.org/10.1117/12.717114" @default.
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