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• W2013802908 abstract "In this Letter we fabricate and characterize suspended silicon (Si) waveguides and ring resonators for mid-infrared wavelength range. Both tunable laser and thermal tuning are used to cover wavelength ranges near 5.2 and 3.4&#xA0;&#x3BC;m. The loaded quality factors are estimated at 2700 at 5.2&#xA0;&#x3BC;m and 7900 at 3.4&#xA0;&#x3BC;m. Heat induced spectrum distortion is observed. Absorption loss is analyzed based on the spectrum distortion, simulation, and all-optical modulation. It is shown that main loss comes from scattering at surface and should be possible to reduce by improving fabrication process." @default.
• W2013802908 created "2016-06-24" @default.
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• W2013802908 date "2013-03-26" @default.
• W2013802908 modified "2023-09-26" @default.
• W2013802908 title "Suspended Si ring resonator for mid-IR application" @default.
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• W2013802908 doi "https://doi.org/10.1364/ol.38.001122" @default.
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