Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013847588> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2013847588 abstract "The micropatteming of multilayer gratings (MLG) using ultraviolet sub-ps laser pulses is described. A micromachining system operating with a 0.5 ps KrF laser (248 nm) was used. Grating structures with a groove width in sub-pm region were created in Mo/Si, Si/Mo, W/Si and Si/W multilayers (MLs) with 5 (in one case 10) periods, each 7-10 nm thick. Grating area was up to 900 x 900 μm<sup>2</sup>. Laser fluence on the samples varied between 60 and 710 mJcm<sup>-2</sup>. Atomic force microscopy, scanning electron microscopy, X-ray reflectivity and X-ray diffraction were used to characterize multilayers and gratings. MIs were locally ablated up to the Si, oxidized Si or glass substrate, or deeper, using from 1 to 5 pulses. The roughness on the surface of lines and in grooves of MLG increased with the depth of ablation. It was caused first of all by debris. The ω-scans around the 1st Bragg maximum show symmetric satellites up to the 2nd or 3rd order, giving the evidence that the ML in MLG is preserved." @default.
- W2013847588 created "2016-06-24" @default.
- W2013847588 creator A5007886466 @default.
- W2013847588 creator A5040892123 @default.
- W2013847588 creator A5049547250 @default.
- W2013847588 creator A5065590323 @default.
- W2013847588 creator A5066611801 @default.
- W2013847588 creator A5068281170 @default.
- W2013847588 creator A5075072362 @default.
- W2013847588 creator A5076192266 @default.
- W2013847588 creator A5087207352 @default.
- W2013847588 date "2005-06-07" @default.
- W2013847588 modified "2023-10-14" @default.
- W2013847588 title "<title>UV sub-ps laser pulse patterning of Mo/Si and W/Si multilayers for soft x-ray gratings</title>" @default.
- W2013847588 cites W1967220406 @default.
- W2013847588 cites W2029944640 @default.
- W2013847588 doi "https://doi.org/10.1117/12.633704" @default.
- W2013847588 hasPublicationYear "2005" @default.
- W2013847588 type Work @default.
- W2013847588 sameAs 2013847588 @default.
- W2013847588 citedByCount "0" @default.
- W2013847588 crossrefType "proceedings-article" @default.
- W2013847588 hasAuthorship W2013847588A5007886466 @default.
- W2013847588 hasAuthorship W2013847588A5040892123 @default.
- W2013847588 hasAuthorship W2013847588A5049547250 @default.
- W2013847588 hasAuthorship W2013847588A5065590323 @default.
- W2013847588 hasAuthorship W2013847588A5066611801 @default.
- W2013847588 hasAuthorship W2013847588A5068281170 @default.
- W2013847588 hasAuthorship W2013847588A5075072362 @default.
- W2013847588 hasAuthorship W2013847588A5076192266 @default.
- W2013847588 hasAuthorship W2013847588A5087207352 @default.
- W2013847588 hasConcept C111368507 @default.
- W2013847588 hasConcept C120665830 @default.
- W2013847588 hasConcept C121332964 @default.
- W2013847588 hasConcept C126753812 @default.
- W2013847588 hasConcept C127313418 @default.
- W2013847588 hasConcept C136525101 @default.
- W2013847588 hasConcept C142724271 @default.
- W2013847588 hasConcept C145667562 @default.
- W2013847588 hasConcept C159985019 @default.
- W2013847588 hasConcept C192562407 @default.
- W2013847588 hasConcept C204787440 @default.
- W2013847588 hasConcept C22078206 @default.
- W2013847588 hasConcept C26771246 @default.
- W2013847588 hasConcept C2776798109 @default.
- W2013847588 hasConcept C2777289219 @default.
- W2013847588 hasConcept C2777813233 @default.
- W2013847588 hasConcept C2779188808 @default.
- W2013847588 hasConcept C49040817 @default.
- W2013847588 hasConcept C520434653 @default.
- W2013847588 hasConcept C544956773 @default.
- W2013847588 hasConcept C71924100 @default.
- W2013847588 hasConceptScore W2013847588C111368507 @default.
- W2013847588 hasConceptScore W2013847588C120665830 @default.
- W2013847588 hasConceptScore W2013847588C121332964 @default.
- W2013847588 hasConceptScore W2013847588C126753812 @default.
- W2013847588 hasConceptScore W2013847588C127313418 @default.
- W2013847588 hasConceptScore W2013847588C136525101 @default.
- W2013847588 hasConceptScore W2013847588C142724271 @default.
- W2013847588 hasConceptScore W2013847588C145667562 @default.
- W2013847588 hasConceptScore W2013847588C159985019 @default.
- W2013847588 hasConceptScore W2013847588C192562407 @default.
- W2013847588 hasConceptScore W2013847588C204787440 @default.
- W2013847588 hasConceptScore W2013847588C22078206 @default.
- W2013847588 hasConceptScore W2013847588C26771246 @default.
- W2013847588 hasConceptScore W2013847588C2776798109 @default.
- W2013847588 hasConceptScore W2013847588C2777289219 @default.
- W2013847588 hasConceptScore W2013847588C2777813233 @default.
- W2013847588 hasConceptScore W2013847588C2779188808 @default.
- W2013847588 hasConceptScore W2013847588C49040817 @default.
- W2013847588 hasConceptScore W2013847588C520434653 @default.
- W2013847588 hasConceptScore W2013847588C544956773 @default.
- W2013847588 hasConceptScore W2013847588C71924100 @default.
- W2013847588 hasLocation W20138475881 @default.
- W2013847588 hasOpenAccess W2013847588 @default.
- W2013847588 hasPrimaryLocation W20138475881 @default.
- W2013847588 hasRelatedWork W1983834479 @default.
- W2013847588 hasRelatedWork W1985248257 @default.
- W2013847588 hasRelatedWork W1992157825 @default.
- W2013847588 hasRelatedWork W1992575171 @default.
- W2013847588 hasRelatedWork W2012191749 @default.
- W2013847588 hasRelatedWork W2039427775 @default.
- W2013847588 hasRelatedWork W2559746644 @default.
- W2013847588 hasRelatedWork W3021469066 @default.
- W2013847588 hasRelatedWork W3111684543 @default.
- W2013847588 hasRelatedWork W3198945108 @default.
- W2013847588 isParatext "false" @default.
- W2013847588 isRetracted "false" @default.
- W2013847588 magId "2013847588" @default.
- W2013847588 workType "article" @default.