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- W2013879073 abstract "An n channel silicon gate MOS process using 10:1 optical projection is described. The minimum dimensions are in the range of 1 µm. Linewidths can be controlled within ± 0.2 µm limits for the polysilicon and the contact hole mask levels, and within ± 0.1 µm for the field oxide and the aluminum mask level. A comparison of measured linewidth variations with variations of simulated photoresist linewidths shows that about one third of the measured variations can be attributed to photolithography." @default.
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- W2013879073 date "1980-01-01" @default.
- W2013879073 modified "2023-09-27" @default.
- W2013879073 title "A 1 µm process: Linewidth control using 10:1 projection lithography" @default.
- W2013879073 doi "https://doi.org/10.1109/iedm.1980.189857" @default.
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