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- W2013882561 abstract "〈100〉 and 〈111〉 oriented Si wafers were implanted with 45 keV, 5 × 1017 cm–2 Ti ions at various beam currents. X-ray diffraction (XRD) patterns show that there are different initial silicides such as C49 TiSi2 and Ti5Si3 on various wafers. While annealing was carried out at higher temperatures, both C49 TiSi2 and Ti5Si3 transform into C54 TiSi2. However, it is noted that C54 TiSi2 indicates different preferential orientations on two kinds of wafers. The change of sheet resistance with annealing temperature reflects that the disilicide is more stable than those obtained by solid phase reaction. It is also valuable to find that Ti atomic profiles show only small changes for various anneals." @default.
- W2013882561 created "2016-06-24" @default.
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- W2013882561 date "2000-05-01" @default.
- W2013882561 modified "2023-09-23" @default.
- W2013882561 title "The Growth and Thermal Stability of Ti-Silicides Obtained by Metal Vapor Vacuum Arc Ion Source Implantation" @default.
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- W2013882561 doi "https://doi.org/10.1002/1521-396x(200005)179:1<95::aid-pssa95>3.0.co;2-s" @default.
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