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• W2013902890 abstract "Hybrid hydrogen plasma was formed by biasing 13.56 MHz radio-frequency (rf) power on a substrate immersed in 2.45 GHz microwave electron cyclotron resonance (ECR) plasma. The influences of the substrate configuration on plasma characteristics were investigated. With increasing rf self-bias voltage, electron temperature, Te, increases obviously in the case of the single-electrode substrate, whereas a slight change in Te was observed with the double-electrode substrate condition. Electron density rises almost with a same magnitude under both two substrate conditions. It exhibited that electron energy and density in ECR-rf hybrid mode could be adjusted independently by controlling rf discharge with favorable substrate configurations." @default.
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• W2013902890 date "2010-03-01" @default.
• W2013902890 modified "2023-09-24" @default.
• W2013902890 title "The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by substrate arrangements" @default.
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• W2013902890 doi "https://doi.org/10.1063/1.3302534" @default.
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