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• W2013915903 abstract "Semiconductor films of II–VI and III–V compounds and alloys have been produced on semiconductors and insulators by decomposing appropriate Group II and Group III metalorganic compounds in the presence of Group V hydrides and Group VI hydrides or alkyl compounds. Group II metalorganics are also found to be suitable dopant sources for the III–V compounds. The halide-free growth process is compatible with existing CVD systems for the formation of elemental semiconductors." @default.
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• W2013915903 date "1972-05-01" @default.
• W2013915903 modified "2023-10-13" @default.
• W2013915903 title "The use of metalorganics in the preparation of semiconductor materials: Growth on insulating substrates" @default.
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• W2013915903 doi "https://doi.org/10.1016/0022-0248(72)90175-3" @default.
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