Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013977667> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2013977667 endingPage "124" @default.
- W2013977667 startingPage "113" @default.
- W2013977667 abstract "Batium strontium titanate (BST) is an important material for dynamic random access memory capacitor applications. In this work, BST thin films are prepared by the MOD method and metal-BST-metal capacitors are fabricated. The DTA and TGA analysis and FTIR analysis are carried out to study reactions of precusor during the heat-treated process. The increase of the crystallinity of films improves the dielectric constant. A 420nm BST thin film annealed at 750 ¯ obtains pure perovskite phase and has a maximum dielectric constant of 628 (at 100 kHz). The relative dielectric permittivity of (Ba x Sr 1- x )TiO 3 with various Ba/Sr ratio is measured and the optimum value of x seems to be 0.6. The leakage current density of the BST thin film is about 0.03 uA/cm 2 at 3V applied voltage." @default.
- W2013977667 created "2016-06-24" @default.
- W2013977667 creator A5037977418 @default.
- W2013977667 creator A5069434639 @default.
- W2013977667 creator A5082997357 @default.
- W2013977667 date "2002-01-01" @default.
- W2013977667 modified "2023-09-23" @default.
- W2013977667 title "Characteristics of BST Thin Film Prepared by Novel Chemical Solution Deposition Method for High-Density DRAM Application" @default.
- W2013977667 doi "https://doi.org/10.1080/713718274" @default.
- W2013977667 hasPublicationYear "2002" @default.
- W2013977667 type Work @default.
- W2013977667 sameAs 2013977667 @default.
- W2013977667 citedByCount "2" @default.
- W2013977667 countsByYear W20139776672021 @default.
- W2013977667 crossrefType "journal-article" @default.
- W2013977667 hasAuthorship W2013977667A5037977418 @default.
- W2013977667 hasAuthorship W2013977667A5069434639 @default.
- W2013977667 hasAuthorship W2013977667A5082997357 @default.
- W2013977667 hasConcept C113196181 @default.
- W2013977667 hasConcept C119599485 @default.
- W2013977667 hasConcept C127413603 @default.
- W2013977667 hasConcept C133386390 @default.
- W2013977667 hasConcept C13760523 @default.
- W2013977667 hasConcept C155011858 @default.
- W2013977667 hasConcept C159985019 @default.
- W2013977667 hasConcept C16317505 @default.
- W2013977667 hasConcept C165801399 @default.
- W2013977667 hasConcept C168651791 @default.
- W2013977667 hasConcept C171250308 @default.
- W2013977667 hasConcept C185592680 @default.
- W2013977667 hasConcept C19067145 @default.
- W2013977667 hasConcept C192562407 @default.
- W2013977667 hasConcept C2781063764 @default.
- W2013977667 hasConcept C42360764 @default.
- W2013977667 hasConcept C43617362 @default.
- W2013977667 hasConcept C46275449 @default.
- W2013977667 hasConcept C49040817 @default.
- W2013977667 hasConcept C52192207 @default.
- W2013977667 hasConcept C91066073 @default.
- W2013977667 hasConceptScore W2013977667C113196181 @default.
- W2013977667 hasConceptScore W2013977667C119599485 @default.
- W2013977667 hasConceptScore W2013977667C127413603 @default.
- W2013977667 hasConceptScore W2013977667C133386390 @default.
- W2013977667 hasConceptScore W2013977667C13760523 @default.
- W2013977667 hasConceptScore W2013977667C155011858 @default.
- W2013977667 hasConceptScore W2013977667C159985019 @default.
- W2013977667 hasConceptScore W2013977667C16317505 @default.
- W2013977667 hasConceptScore W2013977667C165801399 @default.
- W2013977667 hasConceptScore W2013977667C168651791 @default.
- W2013977667 hasConceptScore W2013977667C171250308 @default.
- W2013977667 hasConceptScore W2013977667C185592680 @default.
- W2013977667 hasConceptScore W2013977667C19067145 @default.
- W2013977667 hasConceptScore W2013977667C192562407 @default.
- W2013977667 hasConceptScore W2013977667C2781063764 @default.
- W2013977667 hasConceptScore W2013977667C42360764 @default.
- W2013977667 hasConceptScore W2013977667C43617362 @default.
- W2013977667 hasConceptScore W2013977667C46275449 @default.
- W2013977667 hasConceptScore W2013977667C49040817 @default.
- W2013977667 hasConceptScore W2013977667C52192207 @default.
- W2013977667 hasConceptScore W2013977667C91066073 @default.
- W2013977667 hasIssue "1" @default.
- W2013977667 hasLocation W20139776671 @default.
- W2013977667 hasOpenAccess W2013977667 @default.
- W2013977667 hasPrimaryLocation W20139776671 @default.
- W2013977667 hasRelatedWork W1546009536 @default.
- W2013977667 hasRelatedWork W1968056127 @default.
- W2013977667 hasRelatedWork W1970670394 @default.
- W2013977667 hasRelatedWork W1971855550 @default.
- W2013977667 hasRelatedWork W1975610390 @default.
- W2013977667 hasRelatedWork W2007388951 @default.
- W2013977667 hasRelatedWork W2016443817 @default.
- W2013977667 hasRelatedWork W2018627354 @default.
- W2013977667 hasRelatedWork W2022415515 @default.
- W2013977667 hasRelatedWork W2053297425 @default.
- W2013977667 hasRelatedWork W2062126387 @default.
- W2013977667 hasRelatedWork W2064783094 @default.
- W2013977667 hasRelatedWork W2093429051 @default.
- W2013977667 hasRelatedWork W2117492108 @default.
- W2013977667 hasRelatedWork W2370301966 @default.
- W2013977667 hasRelatedWork W2393139558 @default.
- W2013977667 hasRelatedWork W317061821 @default.
- W2013977667 hasRelatedWork W798808762 @default.
- W2013977667 hasRelatedWork W842336798 @default.
- W2013977667 hasRelatedWork W2115153940 @default.
- W2013977667 hasVolume "47" @default.
- W2013977667 isParatext "false" @default.
- W2013977667 isRetracted "false" @default.
- W2013977667 magId "2013977667" @default.
- W2013977667 workType "article" @default.