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• W2013997432 abstract "Abstract A method for simulating the properties of micromachined oscillating structures is presented in this paper. Special effort is made to investigate the hydrodynamic effects governing the properties of oscillating extensional-mode and tuning-fork quartz resonators used as nontactile profile sensors. Simulations of the influence of electrostatic fields on micromachined cantilevers are presented, too. The calculated hydrodynamic or electrostatic forces are incorporated in the mechanical and the piezoelectric simulations of the microstructures by coupling different finite-element simulation tools, like FIDAP for hydrodynamic simulation and ANSYS for electrostatic, piezoelectric and mechanical simulations. Some problems with a simpler geometry are simulated and compared with their analytical solutions in order to verify the calculations. Comparing the simulated behaviour of the microstructures with experimental results is the second way of verification. The described method of modelling microsystems and their dependence on external fields suggests a possible way to understand the properties of microsensors in order to improve their selectivity and sensitivity." @default.
• W2013997432 created "2016-06-24" @default.
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• W2013997432 date "1994-04-01" @default.
• W2013997432 modified "2023-10-03" @default.
• W2013997432 title "Modelling of oscillating quartz sensors and related structures" @default.
• W2013997432 cites W2013108813 @default.
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• W2013997432 doi "https://doi.org/10.1016/0924-4247(94)80069-3" @default.
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