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- W2014004003 abstract "Laser processing methods have been widely used in microelectronics technology due to the following advantages: the zone of laser action can be decreased by focusing the beam into a small spot non-contact treatment eliminates undesirable introduction of impurities into laser-affected zone; the control of the energetic parameters and the spatial position of the treatment zone is relatively simple; laser treatment process is compatible with automatic control based on microprocessor systems. In this connection, the problem of laser radiation-substance interaction arises as well as the need for developing the technological processes ensuring high efficiency and quality of production, improvement of very large-scale integration (VLSI) parameters, and making products with unique characteristics." @default.
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- W2014004003 date "1990-06-01" @default.
- W2014004003 modified "2023-09-23" @default.
- W2014004003 title "Pulsed laser technology in microelectronics" @default.
- W2014004003 doi "https://doi.org/10.1117/12.18489" @default.
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