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- W2014019232 abstract "This research, integratable capacitive relative humidity sensor was produced using polyimide on glass substrate. Also, at the time of upper electrode formation, upper electrode grain size was affected by giving changes to sputtering condition. Through this analyzing electrical characteristics affect from capacitive relative humidity sensor was possible. Capacitance of capacitive relative humidity sensor was 330 pF, linearity of 0.6%FS and it showed less than 3% of low hysterisis. Specially, hysterisis was affected more from interface than interstitial. Also was affected by the grain size which is one of the formation condition of upper electrode." @default.
- W2014019232 created "2016-06-24" @default.
- W2014019232 creator A5023831146 @default.
- W2014019232 date "2011-03-01" @default.
- W2014019232 modified "2023-09-30" @default.
- W2014019232 title "Effects of the Electrical Characteristics of Capacitive Relative Humidity Sensor by Polyimide Film and Upper Electrode Grain by Sputtering Method" @default.
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- W2014019232 doi "https://doi.org/10.4313/jkem.2011.24.3.224" @default.
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