FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014020114> ?p ?o ?g. }

• W2014020114 endingPage "G110" @default.
• W2014020114 startingPage "G110" @default.
• W2014020114 abstract "Polycrystalline (poly-SiGe) is a known gate electrode material that can mitigate poly-depletion effects, which exist in deep submicrometer complementary metal-oxide-semiconductor (CMOS) transistors, due to its lower dopant activation temperatures and smaller bandgaps. As an important step toward the manufacturing of poly-SiGe electrode-based CMOS transistors with enhanced performances, this study focuses on the deposition of poly-SiGe films with different structural features and the characterization of the physical properties of these films. The electrical performance and the reduction in poly-depletion effects of the poly-SiGe electrodes in capacitors fabricated using these films were verified using capacitance-voltage measurements. © 2004 The Electrochemical Society. All rights reserved." @default.
• W2014020114 created "2016-06-24" @default.
• W2014020114 creator A5004261028 @default.
• W2014020114 creator A5006923948 @default.
• W2014020114 creator A5010393832 @default.
• W2014020114 creator A5011934407 @default.
• W2014020114 creator A5014873435 @default.
• W2014020114 creator A5016556312 @default.
• W2014020114 creator A5018474450 @default.
• W2014020114 creator A5020504671 @default.
• W2014020114 creator A5027055684 @default.
• W2014020114 creator A5035409461 @default.
• W2014020114 creator A5036767479 @default.
• W2014020114 creator A5037520687 @default.
• W2014020114 creator A5041869247 @default.
• W2014020114 creator A5075442119 @default.
• W2014020114 creator A5075729547 @default.
• W2014020114 creator A5079612562 @default.
• W2014020114 date "2005-01-01" @default.
• W2014020114 modified "2023-09-26" @default.
• W2014020114 title "Deposition and Characterization of Polycrystalline Si[sub 1−x]Ge[sub x] Films for CMOS Transistors Gate Electrode Applications" @default.
• W2014020114 cites W1621006718 @default.
• W2014020114 cites W1978474382 @default.
• W2014020114 cites W1993397417 @default.
• W2014020114 cites W1996743061 @default.
• W2014020114 cites W2086530428 @default.
• W2014020114 cites W2090209762 @default.
• W2014020114 cites W2095952457 @default.
• W2014020114 cites W2124725014 @default.
• W2014020114 cites W2159028069 @default.
• W2014020114 cites W2221977575 @default.
• W2014020114 doi "https://doi.org/10.1149/1.1836125" @default.
• W2014020114 hasPublicationYear "2005" @default.
• W2014020114 type Work @default.
• W2014020114 sameAs 2014020114 @default.
• W2014020114 citedByCount "4" @default.
• W2014020114 countsByYear W20140201142012 @default.
• W2014020114 crossrefType "journal-article" @default.
• W2014020114 hasAuthorship W2014020114A5004261028 @default.
• W2014020114 hasAuthorship W2014020114A5006923948 @default.
• W2014020114 hasAuthorship W2014020114A5010393832 @default.
• W2014020114 hasAuthorship W2014020114A5011934407 @default.
• W2014020114 hasAuthorship W2014020114A5014873435 @default.
• W2014020114 hasAuthorship W2014020114A5016556312 @default.
• W2014020114 hasAuthorship W2014020114A5018474450 @default.
• W2014020114 hasAuthorship W2014020114A5020504671 @default.
• W2014020114 hasAuthorship W2014020114A5027055684 @default.
• W2014020114 hasAuthorship W2014020114A5035409461 @default.
• W2014020114 hasAuthorship W2014020114A5036767479 @default.
• W2014020114 hasAuthorship W2014020114A5037520687 @default.
• W2014020114 hasAuthorship W2014020114A5041869247 @default.
• W2014020114 hasAuthorship W2014020114A5075442119 @default.
• W2014020114 hasAuthorship W2014020114A5075729547 @default.
• W2014020114 hasAuthorship W2014020114A5079612562 @default.
• W2014020114 hasConcept C119599485 @default.
• W2014020114 hasConcept C127413603 @default.
• W2014020114 hasConcept C137637335 @default.
• W2014020114 hasConcept C147789679 @default.
• W2014020114 hasConcept C151730666 @default.
• W2014020114 hasConcept C165801399 @default.
• W2014020114 hasConcept C171250308 @default.
• W2014020114 hasConcept C172385210 @default.
• W2014020114 hasConcept C17525397 @default.
• W2014020114 hasConcept C185592680 @default.
• W2014020114 hasConcept C191897082 @default.
• W2014020114 hasConcept C191952053 @default.
• W2014020114 hasConcept C192562407 @default.
• W2014020114 hasConcept C2779227376 @default.
• W2014020114 hasConcept C2780081452 @default.
• W2014020114 hasConcept C2780565262 @default.
• W2014020114 hasConcept C2780841128 @default.
• W2014020114 hasConcept C2816523 @default.
• W2014020114 hasConcept C30066665 @default.
• W2014020114 hasConcept C46362747 @default.
• W2014020114 hasConcept C49040817 @default.
• W2014020114 hasConcept C52192207 @default.
• W2014020114 hasConcept C57863236 @default.
• W2014020114 hasConcept C64297162 @default.
• W2014020114 hasConcept C86803240 @default.
• W2014020114 hasConcept C87359718 @default.
• W2014020114 hasConceptScore W2014020114C119599485 @default.
• W2014020114 hasConceptScore W2014020114C127413603 @default.
• W2014020114 hasConceptScore W2014020114C137637335 @default.
• W2014020114 hasConceptScore W2014020114C147789679 @default.
• W2014020114 hasConceptScore W2014020114C151730666 @default.
• W2014020114 hasConceptScore W2014020114C165801399 @default.
• W2014020114 hasConceptScore W2014020114C171250308 @default.
• W2014020114 hasConceptScore W2014020114C172385210 @default.
• W2014020114 hasConceptScore W2014020114C17525397 @default.
• W2014020114 hasConceptScore W2014020114C185592680 @default.
• W2014020114 hasConceptScore W2014020114C191897082 @default.
• W2014020114 hasConceptScore W2014020114C191952053 @default.
• W2014020114 hasConceptScore W2014020114C192562407 @default.
• W2014020114 hasConceptScore W2014020114C2779227376 @default.
• W2014020114 hasConceptScore W2014020114C2780081452 @default.
• W2014020114 hasConceptScore W2014020114C2780565262 @default.
• W2014020114 hasConceptScore W2014020114C2780841128 @default.
• W2014020114 hasConceptScore W2014020114C2816523 @default.

• next