Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014059327> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2014059327 abstract "Modern technologies for power semiconductor devices, laser and micro optics, micromechanics requires microlithography of patterns having a large are up to 100 cm<SUP>2</SUP> with complicate precise drawing. The electron beam lithography (EBL) tools with variable shape beam have good prospects for this purpose, but their application has a few problems in case of the tasks pointed above. The main problems are a great volume of information and a large exposure time of such patterns. We propose the system for preparation of the exposure data having more than 100 MB volume that consists from set of personal computers, network adapters, and software. The preparation of graphic information and exposure strategy are presented. The optimum exposure conditions are determined by program modeling the exposure process in dependence on the statistic distribution of sizes of EBL figures. Our method permits to decrease the exposure time in several times under certain conditions and brings that nearer to theoretical limit T<SUB>min</SUB> equals SD/I<SUB>Bmax</SUB>, where T<SUB>min</SUB> is minimum exposure time, S is exposure area, D is dose density, I<SUB>Bmax</SUB> is maximum beam current. This approach is valid if the basic factor limiting the writing speed is I<SUB>Bmax</SUB>. The developed computer system and writing strategy was applied us for mask making on modified ZBA-21 tool. These masks were meant for production of power semiconductor and laser optics devices." @default.
- W2014059327 created "2016-06-24" @default.
- W2014059327 creator A5020855157 @default.
- W2014059327 creator A5044807212 @default.
- W2014059327 creator A5045282231 @default.
- W2014059327 date "1995-05-19" @default.
- W2014059327 modified "2023-09-23" @default.
- W2014059327 title "Master masks for big patterns by electron-beam lithography" @default.
- W2014059327 doi "https://doi.org/10.1117/12.209181" @default.
- W2014059327 hasPublicationYear "1995" @default.
- W2014059327 type Work @default.
- W2014059327 sameAs 2014059327 @default.
- W2014059327 citedByCount "0" @default.
- W2014059327 crossrefType "proceedings-article" @default.
- W2014059327 hasAuthorship W2014059327A5020855157 @default.
- W2014059327 hasAuthorship W2014059327A5044807212 @default.
- W2014059327 hasAuthorship W2014059327A5045282231 @default.
- W2014059327 hasConcept C120665830 @default.
- W2014059327 hasConcept C121332964 @default.
- W2014059327 hasConcept C160671074 @default.
- W2014059327 hasConcept C168834538 @default.
- W2014059327 hasConcept C171250308 @default.
- W2014059327 hasConcept C192562407 @default.
- W2014059327 hasConcept C199360897 @default.
- W2014059327 hasConcept C200274948 @default.
- W2014059327 hasConcept C204223013 @default.
- W2014059327 hasConcept C20556612 @default.
- W2014059327 hasConcept C2777904410 @default.
- W2014059327 hasConcept C2779227376 @default.
- W2014059327 hasConcept C41008148 @default.
- W2014059327 hasConcept C49040817 @default.
- W2014059327 hasConcept C520434653 @default.
- W2014059327 hasConcept C53524968 @default.
- W2014059327 hasConcept C62520636 @default.
- W2014059327 hasConcept C66018809 @default.
- W2014059327 hasConcept C79635011 @default.
- W2014059327 hasConceptScore W2014059327C120665830 @default.
- W2014059327 hasConceptScore W2014059327C121332964 @default.
- W2014059327 hasConceptScore W2014059327C160671074 @default.
- W2014059327 hasConceptScore W2014059327C168834538 @default.
- W2014059327 hasConceptScore W2014059327C171250308 @default.
- W2014059327 hasConceptScore W2014059327C192562407 @default.
- W2014059327 hasConceptScore W2014059327C199360897 @default.
- W2014059327 hasConceptScore W2014059327C200274948 @default.
- W2014059327 hasConceptScore W2014059327C204223013 @default.
- W2014059327 hasConceptScore W2014059327C20556612 @default.
- W2014059327 hasConceptScore W2014059327C2777904410 @default.
- W2014059327 hasConceptScore W2014059327C2779227376 @default.
- W2014059327 hasConceptScore W2014059327C41008148 @default.
- W2014059327 hasConceptScore W2014059327C49040817 @default.
- W2014059327 hasConceptScore W2014059327C520434653 @default.
- W2014059327 hasConceptScore W2014059327C53524968 @default.
- W2014059327 hasConceptScore W2014059327C62520636 @default.
- W2014059327 hasConceptScore W2014059327C66018809 @default.
- W2014059327 hasConceptScore W2014059327C79635011 @default.
- W2014059327 hasLocation W20140593271 @default.
- W2014059327 hasOpenAccess W2014059327 @default.
- W2014059327 hasPrimaryLocation W20140593271 @default.
- W2014059327 hasRelatedWork W1978143552 @default.
- W2014059327 hasRelatedWork W1996433503 @default.
- W2014059327 hasRelatedWork W2045370251 @default.
- W2014059327 hasRelatedWork W2052975939 @default.
- W2014059327 hasRelatedWork W2070639305 @default.
- W2014059327 hasRelatedWork W2120870994 @default.
- W2014059327 hasRelatedWork W3053914760 @default.
- W2014059327 hasRelatedWork W35083670 @default.
- W2014059327 hasRelatedWork W4249668346 @default.
- W2014059327 hasRelatedWork W636901708 @default.
- W2014059327 isParatext "false" @default.
- W2014059327 isRetracted "false" @default.
- W2014059327 magId "2014059327" @default.
- W2014059327 workType "article" @default.