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• W2014069369 abstract "Fluorinated films were deposited from radiofrequency discharges of toluene/trifluorotoluene and toluene/sulfur hexafluoride mixtures. Actinometric optical emission spectroscopy was used to determine trends in the concentrations of the plasma species H, CH, and F as a function of the partial pressure of trifluorotoluene or sulfur hexafluoride present (expressed as a percentage of the total chamber pressure) designated RT and Rs, respectively. Transmission infrared spectrophotometry and electron spectroscopy for chemical analysis revealed that the films contain various fluorine-containing functionalities and that the degree of fluorination increases as RT or Rs is increased. Ultraviolet-visible spectrophotometry of films deposited at various values of RT and of Rs allowed the determination of the absorption coefficients α of the films. From plots of α as a function of photon energy it was possible to calculate the optical gap (E04). An intriguing result was a decline and subsequent rise in E04 as Rs was increased. Molecular modelling using ZINDO/PM3 calculations provided a semi-quantitative explanation of the dependence of E04 on Rs." @default.
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• W2014069369 date "1997-07-01" @default.
• W2014069369 modified "2023-10-09" @default.
• W2014069369 title "Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD" @default.
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• W2014069369 doi "https://doi.org/10.1016/s0040-6090(97)00308-8" @default.
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