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- W2014080313 abstract "We report the design, fabrication and performance of the 5 x 2 pixel uncooled microbolometer array. The test microbolometer utilizes pulsed laser deposited vanadium oxide film at room temperature as the IR sensitive layer. The microbolometer was fabricated without air-gap thermal isolation structure and the pixel area of about 200 x 800 μm<sup>2</sup>. The observed change in bolometer resistance with respect to temperature (dR/dT) as high as 9.3 x 10<sup>3</sup> Ω/°C and temperature coefficient of resistance (TCR) of about 5%/°C at room temperature, implies an excellent bolometric response. The room temperature deposition of the IR sensing layer facilitates their integration with the existing complementary metal-oxide-semiconductor (CMOS) technology for better signal processing. IR response of the device was evaluated in the spectral region 8 - 15 μm. The preliminary IR characterization revealed that the test microbolometer exhibits responsivity (R<sub>v</sub>) and detectivity (D*) approximately as 36 V/W and 6 x 10<sup>5</sup> cm<sup>2</sup>Hz<sup>1/2</sup>/W at chopper frequency of 10 Hz for 50 μA bias current. Provided with the air-gap thermal isolation structure, the microbolometer will exhibit responsivity (R<sub>v</sub>) over 1.2 x 10<sup>4</sup> V/W, which compares well with the reported values." @default.
- W2014080313 created "2016-06-24" @default.
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- W2014080313 date "2003-10-16" @default.
- W2014080313 modified "2023-09-24" @default.
- W2014080313 title "Room-temperature IR detection using pulsed laser deposited vanadium oxide bolometer" @default.
- W2014080313 doi "https://doi.org/10.1117/12.514563" @default.
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