Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014136013> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2014136013 endingPage "28" @default.
- W2014136013 startingPage "26" @default.
- W2014136013 abstract "Experimental details and results are presented for a permanent magnet electron cyclotron resonance plasma source matched to a multipolar confined process chamber. A Nd–Fe–B magnet structure provides a resonant axial magnetic field with no electrical or cooling input power, replacing the more typical current driven coils. Plasma parameter and etch characterization measurements in Ar and SF6 are presented for the pressure range 0.1–1.0 mTorr and input microwave power levels 100–500 W." @default.
- W2014136013 created "2016-06-24" @default.
- W2014136013 creator A5027826865 @default.
- W2014136013 creator A5071078735 @default.
- W2014136013 date "1991-01-01" @default.
- W2014136013 modified "2023-10-16" @default.
- W2014136013 title "Characterization of a permanent magnet electron cyclotron resonance plasma source" @default.
- W2014136013 doi "https://doi.org/10.1116/1.585785" @default.
- W2014136013 hasPublicationYear "1991" @default.
- W2014136013 type Work @default.
- W2014136013 sameAs 2014136013 @default.
- W2014136013 citedByCount "21" @default.
- W2014136013 countsByYear W20141360132013 @default.
- W2014136013 crossrefType "journal-article" @default.
- W2014136013 hasAuthorship W2014136013A5027826865 @default.
- W2014136013 hasAuthorship W2014136013A5071078735 @default.
- W2014136013 hasConcept C121332964 @default.
- W2014136013 hasConcept C147120987 @default.
- W2014136013 hasConcept C16389437 @default.
- W2014136013 hasConcept C171250308 @default.
- W2014136013 hasConcept C175361016 @default.
- W2014136013 hasConcept C184779094 @default.
- W2014136013 hasConcept C185544564 @default.
- W2014136013 hasConcept C188224857 @default.
- W2014136013 hasConcept C192562407 @default.
- W2014136013 hasConcept C2780841128 @default.
- W2014136013 hasConcept C39527238 @default.
- W2014136013 hasConcept C44838205 @default.
- W2014136013 hasConcept C46141821 @default.
- W2014136013 hasConcept C62520636 @default.
- W2014136013 hasConcept C82706917 @default.
- W2014136013 hasConceptScore W2014136013C121332964 @default.
- W2014136013 hasConceptScore W2014136013C147120987 @default.
- W2014136013 hasConceptScore W2014136013C16389437 @default.
- W2014136013 hasConceptScore W2014136013C171250308 @default.
- W2014136013 hasConceptScore W2014136013C175361016 @default.
- W2014136013 hasConceptScore W2014136013C184779094 @default.
- W2014136013 hasConceptScore W2014136013C185544564 @default.
- W2014136013 hasConceptScore W2014136013C188224857 @default.
- W2014136013 hasConceptScore W2014136013C192562407 @default.
- W2014136013 hasConceptScore W2014136013C2780841128 @default.
- W2014136013 hasConceptScore W2014136013C39527238 @default.
- W2014136013 hasConceptScore W2014136013C44838205 @default.
- W2014136013 hasConceptScore W2014136013C46141821 @default.
- W2014136013 hasConceptScore W2014136013C62520636 @default.
- W2014136013 hasConceptScore W2014136013C82706917 @default.
- W2014136013 hasIssue "1" @default.
- W2014136013 hasLocation W20141360131 @default.
- W2014136013 hasOpenAccess W2014136013 @default.
- W2014136013 hasPrimaryLocation W20141360131 @default.
- W2014136013 hasRelatedWork W1980978296 @default.
- W2014136013 hasRelatedWork W2043641639 @default.
- W2014136013 hasRelatedWork W2046733275 @default.
- W2014136013 hasRelatedWork W2070150462 @default.
- W2014136013 hasRelatedWork W2081964797 @default.
- W2014136013 hasRelatedWork W2089514710 @default.
- W2014136013 hasRelatedWork W2111638789 @default.
- W2014136013 hasRelatedWork W2389001848 @default.
- W2014136013 hasRelatedWork W2894336068 @default.
- W2014136013 hasRelatedWork W3104083206 @default.
- W2014136013 hasVolume "9" @default.
- W2014136013 isParatext "false" @default.
- W2014136013 isRetracted "false" @default.
- W2014136013 magId "2014136013" @default.
- W2014136013 workType "article" @default.