Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014146573> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2014146573 endingPage "486" @default.
- W2014146573 startingPage "482" @default.
- W2014146573 abstract "A system for routine secondary ion mass spectrometry (sputter ion mass spectrometry) under uhv conditions has been developed. Positive as well as negative ions released from metals, semiconductors, and insulators can be measured. The system can be used for monolayer analysis (with low primary intensities) and for profile measurements in thin films. Electron induced desorption investigations are possible with the same arrangement. Means are provided to combine the secondary ion analysis with Auger spectrometry. A multitarget array allows up to 12 samples to be measured. The analytical system consists of a primary ion gun, a charge neutralizing electron source and a specially modified quadrupole mass spectrometer. Fast pulse counting technique is used for the ion detection. The uhv system is pumped by a turbomolecular pump, a liquid nitrogen cooled trap and a titanium sublimation pump. Pressures in the 10−11 Torr range can be obtained. In a number of typical examples the versatility of the instrument is demonstrated." @default.
- W2014146573 created "2016-06-24" @default.
- W2014146573 creator A5006771253 @default.
- W2014146573 creator A5062799060 @default.
- W2014146573 creator A5082013172 @default.
- W2014146573 date "1972-01-01" @default.
- W2014146573 modified "2023-09-26" @default.
- W2014146573 title "An Analytical System for Secondary Ion Mass Spectrometry in Ultra High Vacuum" @default.
- W2014146573 doi "https://doi.org/10.1116/1.1316662" @default.
- W2014146573 hasPublicationYear "1972" @default.
- W2014146573 type Work @default.
- W2014146573 sameAs 2014146573 @default.
- W2014146573 citedByCount "19" @default.
- W2014146573 countsByYear W20141465732023 @default.
- W2014146573 crossrefType "journal-article" @default.
- W2014146573 hasAuthorship W2014146573A5006771253 @default.
- W2014146573 hasAuthorship W2014146573A5062799060 @default.
- W2014146573 hasAuthorship W2014146573A5082013172 @default.
- W2014146573 hasBestOaLocation W20141465731 @default.
- W2014146573 hasConcept C103232671 @default.
- W2014146573 hasConcept C107920040 @default.
- W2014146573 hasConcept C113196181 @default.
- W2014146573 hasConcept C121332964 @default.
- W2014146573 hasConcept C145148216 @default.
- W2014146573 hasConcept C15744967 @default.
- W2014146573 hasConcept C162356407 @default.
- W2014146573 hasConcept C171250308 @default.
- W2014146573 hasConcept C178790620 @default.
- W2014146573 hasConcept C184779094 @default.
- W2014146573 hasConcept C185592680 @default.
- W2014146573 hasConcept C187529661 @default.
- W2014146573 hasConcept C188224857 @default.
- W2014146573 hasConcept C19067145 @default.
- W2014146573 hasConcept C192562407 @default.
- W2014146573 hasConcept C22423302 @default.
- W2014146573 hasConcept C31827203 @default.
- W2014146573 hasConcept C43617362 @default.
- W2014146573 hasConcept C542102704 @default.
- W2014146573 hasConcept C58437636 @default.
- W2014146573 hasConcept C71043704 @default.
- W2014146573 hasConcept C710854 @default.
- W2014146573 hasConcept C73963958 @default.
- W2014146573 hasConcept C77671233 @default.
- W2014146573 hasConceptScore W2014146573C103232671 @default.
- W2014146573 hasConceptScore W2014146573C107920040 @default.
- W2014146573 hasConceptScore W2014146573C113196181 @default.
- W2014146573 hasConceptScore W2014146573C121332964 @default.
- W2014146573 hasConceptScore W2014146573C145148216 @default.
- W2014146573 hasConceptScore W2014146573C15744967 @default.
- W2014146573 hasConceptScore W2014146573C162356407 @default.
- W2014146573 hasConceptScore W2014146573C171250308 @default.
- W2014146573 hasConceptScore W2014146573C178790620 @default.
- W2014146573 hasConceptScore W2014146573C184779094 @default.
- W2014146573 hasConceptScore W2014146573C185592680 @default.
- W2014146573 hasConceptScore W2014146573C187529661 @default.
- W2014146573 hasConceptScore W2014146573C188224857 @default.
- W2014146573 hasConceptScore W2014146573C19067145 @default.
- W2014146573 hasConceptScore W2014146573C192562407 @default.
- W2014146573 hasConceptScore W2014146573C22423302 @default.
- W2014146573 hasConceptScore W2014146573C31827203 @default.
- W2014146573 hasConceptScore W2014146573C43617362 @default.
- W2014146573 hasConceptScore W2014146573C542102704 @default.
- W2014146573 hasConceptScore W2014146573C58437636 @default.
- W2014146573 hasConceptScore W2014146573C71043704 @default.
- W2014146573 hasConceptScore W2014146573C710854 @default.
- W2014146573 hasConceptScore W2014146573C73963958 @default.
- W2014146573 hasConceptScore W2014146573C77671233 @default.
- W2014146573 hasIssue "1" @default.
- W2014146573 hasLocation W20141465731 @default.
- W2014146573 hasOpenAccess W2014146573 @default.
- W2014146573 hasPrimaryLocation W20141465731 @default.
- W2014146573 hasRelatedWork W143072125 @default.
- W2014146573 hasRelatedWork W1978591507 @default.
- W2014146573 hasRelatedWork W1987739654 @default.
- W2014146573 hasRelatedWork W2014146573 @default.
- W2014146573 hasRelatedWork W2030238622 @default.
- W2014146573 hasRelatedWork W2047986932 @default.
- W2014146573 hasRelatedWork W2057932716 @default.
- W2014146573 hasRelatedWork W2116961768 @default.
- W2014146573 hasRelatedWork W2275455293 @default.
- W2014146573 hasRelatedWork W2340146906 @default.
- W2014146573 hasVolume "9" @default.
- W2014146573 isParatext "false" @default.
- W2014146573 isRetracted "false" @default.
- W2014146573 magId "2014146573" @default.
- W2014146573 workType "article" @default.