Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014149021> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2014149021 abstract "Ta-Si-O composite films have been developed for the single-layer attenuated phase-shifting mask (A.PSM). The films were deposited in an reactive-sputtering system with separating Ta and Si guns. The refractive index and the extinction coefficient of films were tuned by changing the oxygen flow rate and gun power of each gun. At the optimum condition, films with the required optical properties for APSM has been obtained. The films obtained will produce π-shift transmittance around 7% for both i-line and DUV lithography, and less than 25% of transmittance at 488 nm which is important for defect inspection. In addition, the films appear to be inert to hot sulfuric acid which is also important in mask cleaning. Together, Ta-Si-O composite film is expected to be a promising material of DUV absorptive shifter." @default.
- W2014149021 created "2016-06-24" @default.
- W2014149021 creator A5001776970 @default.
- W2014149021 creator A5015371801 @default.
- W2014149021 creator A5026722416 @default.
- W2014149021 creator A5047286572 @default.
- W2014149021 creator A5068777443 @default.
- W2014149021 creator A5076285405 @default.
- W2014149021 creator A5091018084 @default.
- W2014149021 date "1996-07-24" @default.
- W2014149021 modified "2023-09-26" @default.
- W2014149021 title "Ta-Si-O absorptive shifter for the attenuated phase-shifting mask" @default.
- W2014149021 doi "https://doi.org/10.1117/12.245212" @default.
- W2014149021 hasPublicationYear "1996" @default.
- W2014149021 type Work @default.
- W2014149021 sameAs 2014149021 @default.
- W2014149021 citedByCount "2" @default.
- W2014149021 crossrefType "proceedings-article" @default.
- W2014149021 hasAuthorship W2014149021A5001776970 @default.
- W2014149021 hasAuthorship W2014149021A5015371801 @default.
- W2014149021 hasAuthorship W2014149021A5026722416 @default.
- W2014149021 hasAuthorship W2014149021A5047286572 @default.
- W2014149021 hasAuthorship W2014149021A5068777443 @default.
- W2014149021 hasAuthorship W2014149021A5076285405 @default.
- W2014149021 hasAuthorship W2014149021A5091018084 @default.
- W2014149021 hasConcept C103864889 @default.
- W2014149021 hasConcept C105487726 @default.
- W2014149021 hasConcept C120665830 @default.
- W2014149021 hasConcept C121332964 @default.
- W2014149021 hasConcept C150493377 @default.
- W2014149021 hasConcept C159985019 @default.
- W2014149021 hasConcept C171250308 @default.
- W2014149021 hasConcept C178790620 @default.
- W2014149021 hasConcept C185592680 @default.
- W2014149021 hasConcept C19067145 @default.
- W2014149021 hasConcept C192562407 @default.
- W2014149021 hasConcept C204223013 @default.
- W2014149021 hasConcept C22423302 @default.
- W2014149021 hasConcept C2779227376 @default.
- W2014149021 hasConcept C42067758 @default.
- W2014149021 hasConcept C44280652 @default.
- W2014149021 hasConcept C49040817 @default.
- W2014149021 hasConcept C76046532 @default.
- W2014149021 hasConcept C90327742 @default.
- W2014149021 hasConceptScore W2014149021C103864889 @default.
- W2014149021 hasConceptScore W2014149021C105487726 @default.
- W2014149021 hasConceptScore W2014149021C120665830 @default.
- W2014149021 hasConceptScore W2014149021C121332964 @default.
- W2014149021 hasConceptScore W2014149021C150493377 @default.
- W2014149021 hasConceptScore W2014149021C159985019 @default.
- W2014149021 hasConceptScore W2014149021C171250308 @default.
- W2014149021 hasConceptScore W2014149021C178790620 @default.
- W2014149021 hasConceptScore W2014149021C185592680 @default.
- W2014149021 hasConceptScore W2014149021C19067145 @default.
- W2014149021 hasConceptScore W2014149021C192562407 @default.
- W2014149021 hasConceptScore W2014149021C204223013 @default.
- W2014149021 hasConceptScore W2014149021C22423302 @default.
- W2014149021 hasConceptScore W2014149021C2779227376 @default.
- W2014149021 hasConceptScore W2014149021C42067758 @default.
- W2014149021 hasConceptScore W2014149021C44280652 @default.
- W2014149021 hasConceptScore W2014149021C49040817 @default.
- W2014149021 hasConceptScore W2014149021C76046532 @default.
- W2014149021 hasConceptScore W2014149021C90327742 @default.
- W2014149021 hasLocation W20141490211 @default.
- W2014149021 hasOpenAccess W2014149021 @default.
- W2014149021 hasPrimaryLocation W20141490211 @default.
- W2014149021 hasRelatedWork W1967108121 @default.
- W2014149021 hasRelatedWork W2039944377 @default.
- W2014149021 hasRelatedWork W2049232054 @default.
- W2014149021 hasRelatedWork W2066795836 @default.
- W2014149021 hasRelatedWork W2370869329 @default.
- W2014149021 hasRelatedWork W2371836893 @default.
- W2014149021 hasRelatedWork W2557269498 @default.
- W2014149021 hasRelatedWork W2936858223 @default.
- W2014149021 hasRelatedWork W2945496024 @default.
- W2014149021 hasRelatedWork W2032530346 @default.
- W2014149021 isParatext "false" @default.
- W2014149021 isRetracted "false" @default.
- W2014149021 magId "2014149021" @default.
- W2014149021 workType "article" @default.