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- W2014162581 abstract "Compositional and structural modifications induced by irradiating amorphous SiO2 with low-energy (300–500 eV) ion and neutral beams of inert gases have been studied. The ion beams were extracted from microwave excited plasmas of inert gases (Ne, Ar and Kr), and the neutral beams were generated by subsequent charge-exchange reactions. The SiO2 layers modified with these beams have been characterized by Auger electron spectroscopy, Rutherford backscattering spectroscopy, reflection high-energy electron diffraction and transmission electron microscopy. It is shown that neutral beam irradiation does not cause preferential sputtering of oxygen from SiO2, whereas ion beam with the same energy causes significant preferential sputtering. For neutral beam irradiation, densification and crystallization of SiO2 were observed: nanometer sized α-cristobalite or α-quartz crystals were formed when amorphous SiO2 was irradiated with more than 1017 neutrals/cm2 and the densified SiO2 layer extended several nanometers beneath these crystals. The reasons for these densification and crystallization phenomena have been discussed in terms of the high temperatures and pressures in local spots formed as a result of bombardment by energetic neutral atoms. For ion beam irradiations, these densification and crystallization phenomena have not been observed." @default.
- W2014162581 created "2016-06-24" @default.
- W2014162581 creator A5043774822 @default.
- W2014162581 date "1995-02-01" @default.
- W2014162581 modified "2023-10-14" @default.
- W2014162581 title "Compositional and structural modifications of amorphous SiO2 by low-energy ion and neutral beam irradiation" @default.
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- W2014162581 doi "https://doi.org/10.1016/0022-3093(94)00499-4" @default.
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