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- W2014194623 abstract "It has been found that chemical mechanical polishing increases the electromigration resistance of a Ti/AlCu/Ti/TiN metal stack. (111) X-ray diffraction polefigures indicate an increased (111) texture of AlCu deposited on a substrate that received at least one CMP step. This improved (111) texture can be attributed to a decreased roughness of the underlying oxide when chemical mechanical polishing is used." @default.
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- W2014194623 date "2000-01-01" @default.
- W2014194623 modified "2023-10-01" @default.
- W2014194623 title "Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminum metallisations" @default.
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- W2014194623 doi "https://doi.org/10.1016/s0167-9317(99)00295-6" @default.
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