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- W2014205006 abstract "We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities." @default.
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- W2014205006 title "Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm" @default.
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- W2014205006 doi "https://doi.org/10.1117/1.2387882" @default.
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