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- W2014240247 abstract "In this paper, a new method for interconnecting free-space micro-optoelectromechanical system (MOEMS) devices isdeveloped. The heterogeneous design and assembly concept is demonstrated by a pair of V-shape actuators and relatedassembly mechanism, fabricated on a silicon-on-insulator (SOI) wafer. A two-channel free-space DWDM filter hasbeen assembled and characterized. The results show low insertion losses. The device architecture allows hybrid opticalsystem integration on a single platform. The assembled optical devices can be made of different materials, on differentsubstrates and/or with incompatible fabrication techniques. The integration platform provides potentials for realizing amicro optical bench with equivalent optical performance that currently require bulk optics setups." @default.
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- W2014240247 date "2007-11-29" @default.
- W2014240247 modified "2023-09-23" @default.
- W2014240247 title "An active interconnecting mechanism for free-space optic applications" @default.
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- W2014240247 doi "https://doi.org/10.1117/12.757799" @default.
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