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- W2014274134 abstract "In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage." @default.
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- W2014274134 date "2002-02-07" @default.
- W2014274134 modified "2023-09-23" @default.
- W2014274134 title "Progress on development of prototype laser reference system for stylus profilometry of large optics" @default.
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- W2014274134 doi "https://doi.org/10.1117/12.454885" @default.
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