Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014307617> ?p ?o ?g. }
- W2014307617 endingPage "085010" @default.
- W2014307617 startingPage "085010" @default.
- W2014307617 abstract "We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry–Perot cavity, attaining an optical finesse of about 6 × 104, and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 × 106 at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics." @default.
- W2014307617 created "2016-06-24" @default.
- W2014307617 creator A5005856221 @default.
- W2014307617 creator A5009082025 @default.
- W2014307617 creator A5009145405 @default.
- W2014307617 creator A5016523601 @default.
- W2014307617 creator A5020573510 @default.
- W2014307617 creator A5026131053 @default.
- W2014307617 creator A5026584682 @default.
- W2014307617 creator A5066942366 @default.
- W2014307617 creator A5069091427 @default.
- W2014307617 creator A5071574577 @default.
- W2014307617 creator A5086303239 @default.
- W2014307617 date "2013-06-24" @default.
- W2014307617 modified "2023-09-24" @default.
- W2014307617 title "Fabrication of low loss MOMS resonators for quantum optics experiments" @default.
- W2014307617 cites W1579234648 @default.
- W2014307617 cites W1967982180 @default.
- W2014307617 cites W1968967456 @default.
- W2014307617 cites W1971794722 @default.
- W2014307617 cites W1980091129 @default.
- W2014307617 cites W1983329723 @default.
- W2014307617 cites W1985030190 @default.
- W2014307617 cites W1995235164 @default.
- W2014307617 cites W1996999449 @default.
- W2014307617 cites W2000411308 @default.
- W2014307617 cites W2001244823 @default.
- W2014307617 cites W2003766880 @default.
- W2014307617 cites W2003796725 @default.
- W2014307617 cites W2012975686 @default.
- W2014307617 cites W2014289558 @default.
- W2014307617 cites W2025997134 @default.
- W2014307617 cites W2027177254 @default.
- W2014307617 cites W2029325278 @default.
- W2014307617 cites W2032627868 @default.
- W2014307617 cites W2040963254 @default.
- W2014307617 cites W2049235558 @default.
- W2014307617 cites W2049517556 @default.
- W2014307617 cites W2056078298 @default.
- W2014307617 cites W2057198157 @default.
- W2014307617 cites W2067390110 @default.
- W2014307617 cites W2067540020 @default.
- W2014307617 cites W2075369743 @default.
- W2014307617 cites W2075465000 @default.
- W2014307617 cites W2080086586 @default.
- W2014307617 cites W2086084765 @default.
- W2014307617 cites W2088195923 @default.
- W2014307617 cites W2095425440 @default.
- W2014307617 cites W2110251070 @default.
- W2014307617 cites W2113042005 @default.
- W2014307617 cites W2131112296 @default.
- W2014307617 cites W2134258168 @default.
- W2014307617 cites W2148079429 @default.
- W2014307617 cites W2151569481 @default.
- W2014307617 cites W2156290918 @default.
- W2014307617 cites W3037264102 @default.
- W2014307617 cites W3101795719 @default.
- W2014307617 cites W3105852026 @default.
- W2014307617 cites W3106042153 @default.
- W2014307617 cites W4247044223 @default.
- W2014307617 doi "https://doi.org/10.1088/0960-1317/23/8/085010" @default.
- W2014307617 hasPublicationYear "2013" @default.
- W2014307617 type Work @default.
- W2014307617 sameAs 2014307617 @default.
- W2014307617 citedByCount "10" @default.
- W2014307617 countsByYear W20143076172014 @default.
- W2014307617 countsByYear W20143076172015 @default.
- W2014307617 countsByYear W20143076172016 @default.
- W2014307617 crossrefType "journal-article" @default.
- W2014307617 hasAuthorship W2014307617A5005856221 @default.
- W2014307617 hasAuthorship W2014307617A5009082025 @default.
- W2014307617 hasAuthorship W2014307617A5009145405 @default.
- W2014307617 hasAuthorship W2014307617A5016523601 @default.
- W2014307617 hasAuthorship W2014307617A5020573510 @default.
- W2014307617 hasAuthorship W2014307617A5026131053 @default.
- W2014307617 hasAuthorship W2014307617A5026584682 @default.
- W2014307617 hasAuthorship W2014307617A5066942366 @default.
- W2014307617 hasAuthorship W2014307617A5069091427 @default.
- W2014307617 hasAuthorship W2014307617A5071574577 @default.
- W2014307617 hasAuthorship W2014307617A5086303239 @default.
- W2014307617 hasConcept C120665830 @default.
- W2014307617 hasConcept C121332964 @default.
- W2014307617 hasConcept C131584629 @default.
- W2014307617 hasConcept C133386390 @default.
- W2014307617 hasConcept C136525101 @default.
- W2014307617 hasConcept C142724271 @default.
- W2014307617 hasConcept C159985019 @default.
- W2014307617 hasConcept C169268690 @default.
- W2014307617 hasConcept C187725362 @default.
- W2014307617 hasConcept C190269828 @default.
- W2014307617 hasConcept C192562407 @default.
- W2014307617 hasConcept C204787440 @default.
- W2014307617 hasConcept C2778204307 @default.
- W2014307617 hasConcept C2779530757 @default.
- W2014307617 hasConcept C49040817 @default.
- W2014307617 hasConcept C520434653 @default.
- W2014307617 hasConcept C62520636 @default.
- W2014307617 hasConcept C6260449 @default.