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- W2014352302 abstract "We demonstrate integrated photonic microdisk resonators in sputtered c-axis oriented aluminum nitride (AlN) films. A 400 nm thick layer of AlN was patterned in a single lithography step with silicon dioxide used for the top and bottom cladding layers. AlN disks with a radius of 20 μm at various spacings to an 850 nm wide waveguide were tested. A loaded quality factor of 28 350 is shown in these microdisks, with an extracted peak shift over power ratio of 0.0495 pm/μW. The demonstration of photonic resonators in a piezoelectric material can lead to novel optomechanical functionalities." @default.
- W2014352302 created "2016-06-24" @default.
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- W2014352302 date "2013-01-02" @default.
- W2014352302 modified "2023-10-15" @default.
- W2014352302 title "Photonic microdisk resonators in aluminum nitride" @default.
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- W2014352302 doi "https://doi.org/10.1063/1.4772601" @default.
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