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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014363560> ?p ?o ?g. }

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• W2014363560 abstract "A new two-dimensional oxidation simulator based on cellular automata is presented. The advancement of the Si-SiO2 and SiO2-air fronts during oxidation has been successfully simulated. The simulator reproduced satisfactorily the oxidation profiles in the case of a Gaussian temperature distribution over the Si surface, as well as in the case of the presence of contamination on the Si surface. Oxidation of non-planar Si surfaces, as well as oxidation through a mask, and oxidation through a mask of non-planar Si surfaces have also been successfully simulated. The simulation results are in good qualitative agreement with experimental data." @default.
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• W2014363560 date "1999-07-01" @default.
• W2014363560 modified "2023-10-18" @default.
• W2014363560 title "A new simulator for the oxidation process in integrated circuit fabrication based on cellular automata" @default.
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• W2014363560 doi "https://doi.org/10.1088/0965-0393/7/4/311" @default.
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