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- W2014373741 endingPage "20" @default.
- W2014373741 startingPage "15" @default.
- W2014373741 abstract "The crystallographic quality of poly-Si films formed by aluminium-induced-crystallisation (AIC) is characterised by electron backscattering diffraction (EBSD). EBSD gives a detailed analysis of the inner-grain structure, the grain boundaries and the grain orientation. The AIC and epitaxy are carried out on either silicon dioxide, glass, oxide coated alumina or mullite ceramics. Average grain sizes of about 8, 11 and 20 μm for respectively flowable oxide coated ceramics, th-SiO2 and glass substrates are obtained and a strong correlation between the average grain size and the size distribution is found. Furthermore, the grains contain subgrain-structures and numerous defects. The crystallographic defects in the AIC layers are mainly low angle boundaries and CSL boundaries (Σ3 and Σ9) for all substrates. Most grain orientations deviate by 5–20° from to the (100) surface plane. High temperature vapour phase epitaxy on the AIC seed layer resulted in a polysilicon layer of similar crystallographic properties than the seed layer although deviations in orientation and additional twin formations were observed." @default.
- W2014373741 created "2016-06-24" @default.
- W2014373741 creator A5019905055 @default.
- W2014373741 creator A5043977562 @default.
- W2014373741 creator A5052664691 @default.
- W2014373741 creator A5087747874 @default.
- W2014373741 date "2006-07-01" @default.
- W2014373741 modified "2023-10-17" @default.
- W2014373741 title "Crystallographic analysis of polysilicon films formed on foreign substrates by aluminium induced crystallisation and epitaxy" @default.
- W2014373741 cites W1986881597 @default.
- W2014373741 cites W1994610604 @default.
- W2014373741 cites W2006748453 @default.
- W2014373741 cites W2015473052 @default.
- W2014373741 cites W2022618011 @default.
- W2014373741 cites W2028059627 @default.
- W2014373741 cites W2028792478 @default.
- W2014373741 cites W2044342200 @default.
- W2014373741 cites W2082964816 @default.
- W2014373741 cites W2086841579 @default.
- W2014373741 cites W2092910093 @default.
- W2014373741 doi "https://doi.org/10.1016/j.tsf.2005.12.147" @default.
- W2014373741 hasPublicationYear "2006" @default.
- W2014373741 type Work @default.
- W2014373741 sameAs 2014373741 @default.
- W2014373741 citedByCount "10" @default.
- W2014373741 countsByYear W20143737412012 @default.
- W2014373741 countsByYear W20143737412015 @default.
- W2014373741 crossrefType "journal-article" @default.
- W2014373741 hasAuthorship W2014373741A5019905055 @default.
- W2014373741 hasAuthorship W2014373741A5043977562 @default.
- W2014373741 hasAuthorship W2014373741A5052664691 @default.
- W2014373741 hasAuthorship W2014373741A5087747874 @default.
- W2014373741 hasConcept C110738630 @default.
- W2014373741 hasConcept C120665830 @default.
- W2014373741 hasConcept C121332964 @default.
- W2014373741 hasConcept C127413603 @default.
- W2014373741 hasConcept C134132462 @default.
- W2014373741 hasConcept C159985019 @default.
- W2014373741 hasConcept C185592680 @default.
- W2014373741 hasConcept C192191005 @default.
- W2014373741 hasConcept C192562407 @default.
- W2014373741 hasConcept C199289684 @default.
- W2014373741 hasConcept C203036418 @default.
- W2014373741 hasConcept C207114421 @default.
- W2014373741 hasConcept C2779227376 @default.
- W2014373741 hasConcept C27805521 @default.
- W2014373741 hasConcept C2781436864 @default.
- W2014373741 hasConcept C42360764 @default.
- W2014373741 hasConcept C47908070 @default.
- W2014373741 hasConcept C513153333 @default.
- W2014373741 hasConcept C77557913 @default.
- W2014373741 hasConcept C8010536 @default.
- W2014373741 hasConcept C87976508 @default.
- W2014373741 hasConceptScore W2014373741C110738630 @default.
- W2014373741 hasConceptScore W2014373741C120665830 @default.
- W2014373741 hasConceptScore W2014373741C121332964 @default.
- W2014373741 hasConceptScore W2014373741C127413603 @default.
- W2014373741 hasConceptScore W2014373741C134132462 @default.
- W2014373741 hasConceptScore W2014373741C159985019 @default.
- W2014373741 hasConceptScore W2014373741C185592680 @default.
- W2014373741 hasConceptScore W2014373741C192191005 @default.
- W2014373741 hasConceptScore W2014373741C192562407 @default.
- W2014373741 hasConceptScore W2014373741C199289684 @default.
- W2014373741 hasConceptScore W2014373741C203036418 @default.
- W2014373741 hasConceptScore W2014373741C207114421 @default.
- W2014373741 hasConceptScore W2014373741C2779227376 @default.
- W2014373741 hasConceptScore W2014373741C27805521 @default.
- W2014373741 hasConceptScore W2014373741C2781436864 @default.
- W2014373741 hasConceptScore W2014373741C42360764 @default.
- W2014373741 hasConceptScore W2014373741C47908070 @default.
- W2014373741 hasConceptScore W2014373741C513153333 @default.
- W2014373741 hasConceptScore W2014373741C77557913 @default.
- W2014373741 hasConceptScore W2014373741C8010536 @default.
- W2014373741 hasConceptScore W2014373741C87976508 @default.
- W2014373741 hasLocation W20143737411 @default.
- W2014373741 hasOpenAccess W2014373741 @default.
- W2014373741 hasPrimaryLocation W20143737411 @default.
- W2014373741 hasRelatedWork W2003669811 @default.
- W2014373741 hasRelatedWork W2007336646 @default.
- W2014373741 hasRelatedWork W2051718981 @default.
- W2014373741 hasRelatedWork W2060493607 @default.
- W2014373741 hasRelatedWork W2317327986 @default.
- W2014373741 hasRelatedWork W2354779788 @default.
- W2014373741 hasRelatedWork W2373836493 @default.
- W2014373741 hasRelatedWork W2374151330 @default.
- W2014373741 hasRelatedWork W2680839865 @default.
- W2014373741 hasRelatedWork W3003348822 @default.
- W2014373741 hasVolume "511-512" @default.
- W2014373741 isParatext "false" @default.
- W2014373741 isRetracted "false" @default.
- W2014373741 magId "2014373741" @default.
- W2014373741 workType "article" @default.