FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014373911> ?p ?o ?g. }

• W2014373911 endingPage "5001" @default.
• W2014373911 startingPage "4997" @default.
• W2014373911 abstract "The mechanism of platinum (Pt)-enhanced oxidation of Si below 300 °C has been investigated by means of high-resolution x-ray photoelectron spectroscopy. When a Pt layer is deposited on the ∼1-nm-thick silicon oxide-covered Si, low-temperature heat treatment grows the silicon oxide layer between the Pt layer and the Si substrate, while silicon oxide is formed mainly on the Pt layer in cases where Pt is directly deposited on the Si substrate. Oxidation is enhanced by the application of a positive bias voltage to the Si substrate with respect to the Pt layer during the heat treatment of the specimens with 〈∼4 nm Pt/silicon oxide/Si(100)〉 structure in oxygen, and in this case, a ∼8-nm-thick oxide layer is formed at 300 °C for 2 h. It demonstrates that oxygen ions are the moving species in the oxide layer. The plots of oxide thickness with respect to oxidation time are linear in the oxide thickness region below 3∼4 nm, indicating that the reaction at the interface is the rate-determining step. The activation energy for the interfacial reaction is estimated to be ∼0.55 eV: much lower than that for oxidation through reaction with oxygen molecules of ∼2 eV. The plots for the subsequent oxidation stage are expressed by logarithmic functions, showing that the migration of oxygen ions in the oxide layer is the rate-limiting process." @default.
• W2014373911 created "2016-06-24" @default.
• W2014373911 creator A5003319013 @default.
• W2014373911 creator A5042474244 @default.
• W2014373911 creator A5066133517 @default.
• W2014373911 creator A5077493135 @default.
• W2014373911 creator A5078062881 @default.
• W2014373911 date "1998-09-22" @default.
• W2014373911 modified "2023-09-24" @default.
• W2014373911 title "Mechanism of platinum-enhanced oxidation of silicon at low temperatures" @default.
• W2014373911 cites W1568985629 @default.
• W2014373911 cites W1972775661 @default.
• W2014373911 cites W1975365259 @default.
• W2014373911 cites W1994117255 @default.
• W2014373911 cites W1995631908 @default.
• W2014373911 cites W1997753132 @default.
• W2014373911 cites W2002843717 @default.
• W2014373911 cites W2014667172 @default.
• W2014373911 cites W2021871308 @default.
• W2014373911 cites W2031337504 @default.
• W2014373911 cites W2044627594 @default.
• W2014373911 cites W2046149470 @default.
• W2014373911 cites W2076652874 @default.
• W2014373911 cites W2078939390 @default.
• W2014373911 cites W2079636275 @default.
• W2014373911 cites W2088398154 @default.
• W2014373911 cites W2091170324 @default.
• W2014373911 cites W2092535244 @default.
• W2014373911 cites W2096946885 @default.
• W2014373911 cites W2122161839 @default.
• W2014373911 cites W2130313070 @default.
• W2014373911 doi "https://doi.org/10.1063/1.477112" @default.
• W2014373911 hasPublicationYear "1998" @default.
• W2014373911 type Work @default.
• W2014373911 sameAs 2014373911 @default.
• W2014373911 citedByCount "37" @default.
• W2014373911 countsByYear W20143739112012 @default.
• W2014373911 countsByYear W20143739112013 @default.
• W2014373911 countsByYear W20143739112014 @default.
• W2014373911 countsByYear W20143739112015 @default.
• W2014373911 countsByYear W20143739112016 @default.
• W2014373911 countsByYear W20143739112017 @default.
• W2014373911 countsByYear W20143739112022 @default.
• W2014373911 crossrefType "journal-article" @default.
• W2014373911 hasAuthorship W2014373911A5003319013 @default.
• W2014373911 hasAuthorship W2014373911A5042474244 @default.
• W2014373911 hasAuthorship W2014373911A5066133517 @default.
• W2014373911 hasAuthorship W2014373911A5077493135 @default.
• W2014373911 hasAuthorship W2014373911A5078062881 @default.
• W2014373911 hasConcept C111368507 @default.
• W2014373911 hasConcept C113196181 @default.
• W2014373911 hasConcept C127313418 @default.
• W2014373911 hasConcept C127413603 @default.
• W2014373911 hasConcept C147789679 @default.
• W2014373911 hasConcept C161790260 @default.
• W2014373911 hasConcept C171250308 @default.
• W2014373911 hasConcept C175708663 @default.
• W2014373911 hasConcept C178790620 @default.
• W2014373911 hasConcept C179104552 @default.
• W2014373911 hasConcept C185592680 @default.
• W2014373911 hasConcept C191897082 @default.
• W2014373911 hasConcept C192562407 @default.
• W2014373911 hasConcept C2777289219 @default.
• W2014373911 hasConcept C2777431650 @default.
• W2014373911 hasConcept C2779105228 @default.
• W2014373911 hasConcept C2779227376 @default.
• W2014373911 hasConcept C2779281663 @default.
• W2014373911 hasConcept C2779851234 @default.
• W2014373911 hasConcept C42360764 @default.
• W2014373911 hasConcept C43617362 @default.
• W2014373911 hasConcept C518104683 @default.
• W2014373911 hasConcept C540031477 @default.
• W2014373911 hasConcept C544956773 @default.
• W2014373911 hasConcept C55493867 @default.
• W2014373911 hasConcept C95121573 @default.
• W2014373911 hasConceptScore W2014373911C111368507 @default.
• W2014373911 hasConceptScore W2014373911C113196181 @default.
• W2014373911 hasConceptScore W2014373911C127313418 @default.
• W2014373911 hasConceptScore W2014373911C127413603 @default.
• W2014373911 hasConceptScore W2014373911C147789679 @default.
• W2014373911 hasConceptScore W2014373911C161790260 @default.
• W2014373911 hasConceptScore W2014373911C171250308 @default.
• W2014373911 hasConceptScore W2014373911C175708663 @default.
• W2014373911 hasConceptScore W2014373911C178790620 @default.
• W2014373911 hasConceptScore W2014373911C179104552 @default.
• W2014373911 hasConceptScore W2014373911C185592680 @default.
• W2014373911 hasConceptScore W2014373911C191897082 @default.
• W2014373911 hasConceptScore W2014373911C192562407 @default.
• W2014373911 hasConceptScore W2014373911C2777289219 @default.
• W2014373911 hasConceptScore W2014373911C2777431650 @default.
• W2014373911 hasConceptScore W2014373911C2779105228 @default.
• W2014373911 hasConceptScore W2014373911C2779227376 @default.
• W2014373911 hasConceptScore W2014373911C2779281663 @default.
• W2014373911 hasConceptScore W2014373911C2779851234 @default.
• W2014373911 hasConceptScore W2014373911C42360764 @default.
• W2014373911 hasConceptScore W2014373911C43617362 @default.
• W2014373911 hasConceptScore W2014373911C518104683 @default.
• W2014373911 hasConceptScore W2014373911C540031477 @default.

• next