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- W2014376618 abstract "TiO2 films are obtained by rf sputtering in an atmosphere of argon—oxygen mixture and the influence of oxygen deficiency in the TiO2 films on their photoconductive properties is studied. All the films display moderate photoconductivity in the near UV region. A broad single peak is observed around 360 nm in the spectral response of the photocurrent, which corresponds approximately to the absorption edge. Thermally stimulated currents are also measured to study trapping levels in the TiO2 films. It is concluded that the defect concentrations in the TiO2 films decrease with increasing oxygen concentration in the sputtering gas. TiO2-Schichten werden durch HF-Sputtering in einer Argon—Sauerstoff-Atmosphäre hergestellt und es wird der Einfluß eines Sauerstoffunterschusses in den TiO2-Schichten auf ihre Photoleitungseigenschaften untersucht. Alle Schichten zeigen mittlere Photoleitfähigkeit im nahen UV-Bereich. Ein einzelnes breites Maximum wird bei etwa 360 nm in der Spektralresponse des Photostromes beobachtet, das näherungsweise mit der Absorptionskante übereinstimmt. Thermisch stimulierte Ströme werden ebenfalls gemessen, um die Haftstellenniveaus in den TiO2-Schichten zu untersuchen. Es wird geschlossen, daß die Defektkonzentrationen in den TiO2-Schichten mit zunehmender Sauerstoffkonzentration im Sputtergas abnimmt." @default.
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- W2014376618 date "1979-10-16" @default.
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- W2014376618 title "Photoconductive properties of sputtered TiO2 films" @default.
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- W2014376618 doi "https://doi.org/10.1002/pssa.2210550237" @default.
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