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- W2014419769 abstract "In this paper, we investigate the possibility of using non- contact surface potential measurements (SPM) to study charging during plasma enhanced CVD TEOS deposition and high current ion implantation. It is found that SPM can be used for a first order and fast-feedback assessment of new recipes and tools as well as for routine monitoring of plasma damaging processes.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2014419769 date "1998-08-27" @default.
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- W2014419769 title "<title>Noncontact surface potential measurements for charging reduction during TEOS deposition and ion implantation</title>" @default.
- W2014419769 doi "https://doi.org/10.1117/12.324399" @default.
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