Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014443573> ?p ?o ?g. }
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- W2014443573 endingPage "1229" @default.
- W2014443573 startingPage "1226" @default.
- W2014443573 abstract "The formation of Schottky contacts on methane/hydrogen reactive-ion-etched (RIE) n+In0.52Al0.48As surfaces has been investigated for the first time. Two metallization systems (Ti/W/Au and Pt/Au) were examined. The ion etching-induced damage in the InAlAs surface layer was evaluated by means of I-V and C-V characterization. Rapid thermal annealing (RTA) at several temperatures was applied for damage removal. Dry-etched Schottky contacts were compared with wet-etched ones. Using the optimized condition of RTA, parameters achieved on RIE-based Schottky contacts were in agreement with theoretical predictions and comparable with thermally processed wet-based ones. The role of the thermal treatment in the final determination of metal-semiconductor interface and contact properties is discussed in detail." @default.
- W2014443573 created "2016-06-24" @default.
- W2014443573 creator A5060953949 @default.
- W2014443573 creator A5069392481 @default.
- W2014443573 date "1994-06-01" @default.
- W2014443573 modified "2023-09-23" @default.
- W2014443573 title "Study of Schottky contact formation on CH4/H2reactive-ion-etched InAlAs" @default.
- W2014443573 cites W1984503918 @default.
- W2014443573 cites W2007705225 @default.
- W2014443573 cites W2020485859 @default.
- W2014443573 cites W2032071120 @default.
- W2014443573 cites W2043695984 @default.
- W2014443573 cites W2063332634 @default.
- W2014443573 cites W2089934754 @default.
- W2014443573 cites W2102850049 @default.
- W2014443573 cites W2315162808 @default.
- W2014443573 doi "https://doi.org/10.1088/0268-1242/9/6/011" @default.
- W2014443573 hasPublicationYear "1994" @default.
- W2014443573 type Work @default.
- W2014443573 sameAs 2014443573 @default.
- W2014443573 citedByCount "4" @default.
- W2014443573 crossrefType "journal-article" @default.
- W2014443573 hasAuthorship W2014443573A5060953949 @default.
- W2014443573 hasAuthorship W2014443573A5069392481 @default.
- W2014443573 hasConcept C100460472 @default.
- W2014443573 hasConcept C108225325 @default.
- W2014443573 hasConcept C113196181 @default.
- W2014443573 hasConcept C130472188 @default.
- W2014443573 hasConcept C145148216 @default.
- W2014443573 hasConcept C159985019 @default.
- W2014443573 hasConcept C16115445 @default.
- W2014443573 hasConcept C171250308 @default.
- W2014443573 hasConcept C178790620 @default.
- W2014443573 hasConcept C185592680 @default.
- W2014443573 hasConcept C191897082 @default.
- W2014443573 hasConcept C192562407 @default.
- W2014443573 hasConcept C205200001 @default.
- W2014443573 hasConcept C2777855556 @default.
- W2014443573 hasConcept C2779227376 @default.
- W2014443573 hasConcept C43617362 @default.
- W2014443573 hasConcept C49040817 @default.
- W2014443573 hasConcept C512968161 @default.
- W2014443573 hasConcept C544153396 @default.
- W2014443573 hasConcept C78434282 @default.
- W2014443573 hasConceptScore W2014443573C100460472 @default.
- W2014443573 hasConceptScore W2014443573C108225325 @default.
- W2014443573 hasConceptScore W2014443573C113196181 @default.
- W2014443573 hasConceptScore W2014443573C130472188 @default.
- W2014443573 hasConceptScore W2014443573C145148216 @default.
- W2014443573 hasConceptScore W2014443573C159985019 @default.
- W2014443573 hasConceptScore W2014443573C16115445 @default.
- W2014443573 hasConceptScore W2014443573C171250308 @default.
- W2014443573 hasConceptScore W2014443573C178790620 @default.
- W2014443573 hasConceptScore W2014443573C185592680 @default.
- W2014443573 hasConceptScore W2014443573C191897082 @default.
- W2014443573 hasConceptScore W2014443573C192562407 @default.
- W2014443573 hasConceptScore W2014443573C205200001 @default.
- W2014443573 hasConceptScore W2014443573C2777855556 @default.
- W2014443573 hasConceptScore W2014443573C2779227376 @default.
- W2014443573 hasConceptScore W2014443573C43617362 @default.
- W2014443573 hasConceptScore W2014443573C49040817 @default.
- W2014443573 hasConceptScore W2014443573C512968161 @default.
- W2014443573 hasConceptScore W2014443573C544153396 @default.
- W2014443573 hasConceptScore W2014443573C78434282 @default.
- W2014443573 hasIssue "6" @default.
- W2014443573 hasLocation W20144435731 @default.
- W2014443573 hasOpenAccess W2014443573 @default.
- W2014443573 hasPrimaryLocation W20144435731 @default.
- W2014443573 hasRelatedWork W1278245314 @default.
- W2014443573 hasRelatedWork W1977506915 @default.
- W2014443573 hasRelatedWork W1988903866 @default.
- W2014443573 hasRelatedWork W2056938397 @default.
- W2014443573 hasRelatedWork W2065628029 @default.
- W2014443573 hasRelatedWork W2108009135 @default.
- W2014443573 hasRelatedWork W2243194799 @default.
- W2014443573 hasRelatedWork W2614156624 @default.
- W2014443573 hasRelatedWork W3004791968 @default.
- W2014443573 hasRelatedWork W3120723223 @default.
- W2014443573 hasVolume "9" @default.
- W2014443573 isParatext "false" @default.
- W2014443573 isRetracted "false" @default.
- W2014443573 magId "2014443573" @default.
- W2014443573 workType "article" @default.