Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014443704> ?p ?o ?g. }
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- W2014443704 endingPage "G113" @default.
- W2014443704 startingPage "G113" @default.
- W2014443704 abstract "The interfacial reaction between poly and films after annealing was investigated to use films as an alternative gate dielectric. In the poly structure, silicidation was the dominant reaction due to continuous formation of Zr-silicide and SiO during annealing. However, in poly silicate formation was the main reaction after annealing at 900°C for 30 min. In addition, after annealing at 800°C, the silicate layer was observed only in the poly system. © 2002 The Electrochemical Society. All rights reserved." @default.
- W2014443704 created "2016-06-24" @default.
- W2014443704 creator A5001023560 @default.
- W2014443704 creator A5031172410 @default.
- W2014443704 creator A5036270761 @default.
- W2014443704 creator A5037206197 @default.
- W2014443704 creator A5055727484 @default.
- W2014443704 creator A5086853667 @default.
- W2014443704 creator A5087156801 @default.
- W2014443704 creator A5087250914 @default.
- W2014443704 date "2002-01-01" @default.
- W2014443704 modified "2023-10-17" @default.
- W2014443704 title "Interfacial Reaction in Poly Si[sub 1−x]Ge[sub x]/ZrO[sub 2] with Ge Content in Poly Si[sub 1−x]Ge[sub x] Films" @default.
- W2014443704 cites W1569685582 @default.
- W2014443704 cites W1991965248 @default.
- W2014443704 cites W1992343392 @default.
- W2014443704 cites W2003645630 @default.
- W2014443704 cites W2019592005 @default.
- W2014443704 cites W2059819937 @default.
- W2014443704 cites W2060706824 @default.
- W2014443704 cites W2066478306 @default.
- W2014443704 cites W2084357356 @default.
- W2014443704 cites W2090123186 @default.
- W2014443704 cites W2131965942 @default.
- W2014443704 doi "https://doi.org/10.1149/1.1516907" @default.
- W2014443704 hasPublicationYear "2002" @default.
- W2014443704 type Work @default.
- W2014443704 sameAs 2014443704 @default.
- W2014443704 citedByCount "5" @default.
- W2014443704 countsByYear W20144437042020 @default.
- W2014443704 countsByYear W20144437042022 @default.
- W2014443704 crossrefType "journal-article" @default.
- W2014443704 hasAuthorship W2014443704A5001023560 @default.
- W2014443704 hasAuthorship W2014443704A5031172410 @default.
- W2014443704 hasAuthorship W2014443704A5036270761 @default.
- W2014443704 hasAuthorship W2014443704A5037206197 @default.
- W2014443704 hasAuthorship W2014443704A5055727484 @default.
- W2014443704 hasAuthorship W2014443704A5086853667 @default.
- W2014443704 hasAuthorship W2014443704A5087156801 @default.
- W2014443704 hasAuthorship W2014443704A5087250914 @default.
- W2014443704 hasConcept C113196181 @default.
- W2014443704 hasConcept C127413603 @default.
- W2014443704 hasConcept C133386390 @default.
- W2014443704 hasConcept C178790620 @default.
- W2014443704 hasConcept C185592680 @default.
- W2014443704 hasConcept C191897082 @default.
- W2014443704 hasConcept C192562407 @default.
- W2014443704 hasConcept C2777335606 @default.
- W2014443704 hasConcept C2777855556 @default.
- W2014443704 hasConcept C2780901251 @default.
- W2014443704 hasConcept C42360764 @default.
- W2014443704 hasConcept C49040817 @default.
- W2014443704 hasConcept C544956773 @default.
- W2014443704 hasConcept C550623735 @default.
- W2014443704 hasConceptScore W2014443704C113196181 @default.
- W2014443704 hasConceptScore W2014443704C127413603 @default.
- W2014443704 hasConceptScore W2014443704C133386390 @default.
- W2014443704 hasConceptScore W2014443704C178790620 @default.
- W2014443704 hasConceptScore W2014443704C185592680 @default.
- W2014443704 hasConceptScore W2014443704C191897082 @default.
- W2014443704 hasConceptScore W2014443704C192562407 @default.
- W2014443704 hasConceptScore W2014443704C2777335606 @default.
- W2014443704 hasConceptScore W2014443704C2777855556 @default.
- W2014443704 hasConceptScore W2014443704C2780901251 @default.
- W2014443704 hasConceptScore W2014443704C42360764 @default.
- W2014443704 hasConceptScore W2014443704C49040817 @default.
- W2014443704 hasConceptScore W2014443704C544956773 @default.
- W2014443704 hasConceptScore W2014443704C550623735 @default.
- W2014443704 hasIssue "12" @default.
- W2014443704 hasLocation W20144437041 @default.
- W2014443704 hasOpenAccess W2014443704 @default.
- W2014443704 hasPrimaryLocation W20144437041 @default.
- W2014443704 hasRelatedWork W1974378933 @default.
- W2014443704 hasRelatedWork W2019621511 @default.
- W2014443704 hasRelatedWork W2037744230 @default.
- W2014443704 hasRelatedWork W2042925312 @default.
- W2014443704 hasRelatedWork W2080215011 @default.
- W2014443704 hasRelatedWork W2088081281 @default.
- W2014443704 hasRelatedWork W2317679397 @default.
- W2014443704 hasRelatedWork W28865760 @default.
- W2014443704 hasRelatedWork W2940927672 @default.
- W2014443704 hasRelatedWork W952650593 @default.
- W2014443704 hasVolume "5" @default.
- W2014443704 isParatext "false" @default.
- W2014443704 isRetracted "false" @default.
- W2014443704 magId "2014443704" @default.
- W2014443704 workType "article" @default.