Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014452741> ?p ?o ?g. }
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- W2014452741 endingPage "259" @default.
- W2014452741 startingPage "255" @default.
- W2014452741 abstract "The effect of hydrogen dilution on microstructure of in situ polycrystalline Si (poly-Si) films grown by catalyzer-enhanced chemical vapor deposition (CECVD) has been investigated by using transmission electron microscopy (TEM) and transmission electron diffraction (TED) analysis. It was shown that the increase of the hydrogen dilution ratio resulted in transition of microstructure of Si thin film from amorphous to polycrystalline in CECVD at low substrate temperature (∼80 °C). These results indicate that the CECVD technique is a promising candidate to grow high-quality in situ polycrystalline Si films on glass or a flexible substrate for low-temperature poly-Si (LTPS) and flexible displays." @default.
- W2014452741 created "2016-06-24" @default.
- W2014452741 creator A5062759041 @default.
- W2014452741 date "2006-12-01" @default.
- W2014452741 modified "2023-10-17" @default.
- W2014452741 title "Hydrogen dilution effect on microstructure of Si thin film grown by catalyzer enhanced chemical vapor deposition" @default.
- W2014452741 cites W1991035979 @default.
- W2014452741 cites W1991664857 @default.
- W2014452741 cites W1992948853 @default.
- W2014452741 cites W2002536446 @default.
- W2014452741 cites W2004010097 @default.
- W2014452741 cites W2013206094 @default.
- W2014452741 cites W2020319395 @default.
- W2014452741 cites W2036956320 @default.
- W2014452741 cites W2042344153 @default.
- W2014452741 cites W2063768888 @default.
- W2014452741 cites W2068511851 @default.
- W2014452741 cites W2085072569 @default.
- W2014452741 cites W2088407810 @default.
- W2014452741 cites W2090504268 @default.
- W2014452741 doi "https://doi.org/10.1016/j.nimb.2006.10.041" @default.
- W2014452741 hasPublicationYear "2006" @default.
- W2014452741 type Work @default.
- W2014452741 sameAs 2014452741 @default.
- W2014452741 citedByCount "1" @default.
- W2014452741 crossrefType "journal-article" @default.
- W2014452741 hasAuthorship W2014452741A5062759041 @default.
- W2014452741 hasConcept C111368507 @default.
- W2014452741 hasConcept C113196181 @default.
- W2014452741 hasConcept C121332964 @default.
- W2014452741 hasConcept C127313418 @default.
- W2014452741 hasConcept C127413603 @default.
- W2014452741 hasConcept C137637335 @default.
- W2014452741 hasConcept C146088050 @default.
- W2014452741 hasConcept C159985019 @default.
- W2014452741 hasConcept C171250308 @default.
- W2014452741 hasConcept C178790620 @default.
- W2014452741 hasConcept C185592680 @default.
- W2014452741 hasConcept C19067145 @default.
- W2014452741 hasConcept C191897082 @default.
- W2014452741 hasConcept C192562407 @default.
- W2014452741 hasConcept C2777289219 @default.
- W2014452741 hasConcept C42360764 @default.
- W2014452741 hasConcept C512968161 @default.
- W2014452741 hasConcept C56052488 @default.
- W2014452741 hasConcept C57410435 @default.
- W2014452741 hasConcept C8010536 @default.
- W2014452741 hasConcept C87976508 @default.
- W2014452741 hasConcept C96618451 @default.
- W2014452741 hasConcept C97355855 @default.
- W2014452741 hasConceptScore W2014452741C111368507 @default.
- W2014452741 hasConceptScore W2014452741C113196181 @default.
- W2014452741 hasConceptScore W2014452741C121332964 @default.
- W2014452741 hasConceptScore W2014452741C127313418 @default.
- W2014452741 hasConceptScore W2014452741C127413603 @default.
- W2014452741 hasConceptScore W2014452741C137637335 @default.
- W2014452741 hasConceptScore W2014452741C146088050 @default.
- W2014452741 hasConceptScore W2014452741C159985019 @default.
- W2014452741 hasConceptScore W2014452741C171250308 @default.
- W2014452741 hasConceptScore W2014452741C178790620 @default.
- W2014452741 hasConceptScore W2014452741C185592680 @default.
- W2014452741 hasConceptScore W2014452741C19067145 @default.
- W2014452741 hasConceptScore W2014452741C191897082 @default.
- W2014452741 hasConceptScore W2014452741C192562407 @default.
- W2014452741 hasConceptScore W2014452741C2777289219 @default.
- W2014452741 hasConceptScore W2014452741C42360764 @default.
- W2014452741 hasConceptScore W2014452741C512968161 @default.
- W2014452741 hasConceptScore W2014452741C56052488 @default.
- W2014452741 hasConceptScore W2014452741C57410435 @default.
- W2014452741 hasConceptScore W2014452741C8010536 @default.
- W2014452741 hasConceptScore W2014452741C87976508 @default.
- W2014452741 hasConceptScore W2014452741C96618451 @default.
- W2014452741 hasConceptScore W2014452741C97355855 @default.
- W2014452741 hasIssue "1-2" @default.
- W2014452741 hasLocation W20144527411 @default.
- W2014452741 hasOpenAccess W2014452741 @default.
- W2014452741 hasPrimaryLocation W20144527411 @default.
- W2014452741 hasRelatedWork W1142261668 @default.
- W2014452741 hasRelatedWork W1966077344 @default.
- W2014452741 hasRelatedWork W1988337966 @default.
- W2014452741 hasRelatedWork W2003228755 @default.
- W2014452741 hasRelatedWork W2004571536 @default.
- W2014452741 hasRelatedWork W2032841230 @default.
- W2014452741 hasRelatedWork W2073355019 @default.
- W2014452741 hasRelatedWork W2088331124 @default.
- W2014452741 hasRelatedWork W2342380383 @default.
- W2014452741 hasRelatedWork W4210256258 @default.
- W2014452741 hasVolume "253" @default.
- W2014452741 isParatext "false" @default.
- W2014452741 isRetracted "false" @default.
- W2014452741 magId "2014452741" @default.
- W2014452741 workType "article" @default.