FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014497256> ?p ?o ?g. }

• W2014497256 endingPage "510" @default.
• W2014497256 startingPage "502" @default.
• W2014497256 abstract "In this paper, the kinematic analysis and numerical calculation are used to discuss the effect of the kinematic parameters on the final polishing result of typical rotary chemical-mechanical polishing (CMP) equipment. The relative velocity distribution and the sliding distance distribution are calculated based on the kinematic analysis. Especially, the coupling relationships between the kinematic parameters are investigated and discussed. And two parameters of the sliding distance nonuniformity (SDNU) and the sliding distance nonuniformity within concentric circles (SDNU-cc) are proposed and calculated to evaluate the global uniformity of the sliding distance and to reveal the coupling relationships between the kinematic parameters. The results suggest that the relative velocity distribution and the sliding distance distribution are significantly affected by the coupling effects of the basic motions of CMP system; the SDNU is mainly affected by parameter α, which represents the coupling relationship between the rotary motions of the wafer carrier and the polishing platen; the SDNU-cc is mainly affected by parameter k' <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T0</sub> (αk <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T0</sub> ), which represents the coupling relationship between the reciprocating motion and the rotary motion of the wafer carrier; α ≈ 1 and αk <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T0</sub> >; 2 are proper for better polishing uniformity in real CMP process." @default.
• W2014497256 created "2016-06-24" @default.
• W2014497256 creator A5003876568 @default.
• W2014497256 creator A5010026629 @default.
• W2014497256 creator A5021955006 @default.
• W2014497256 creator A5090373659 @default.
• W2014497256 date "2012-08-01" @default.
• W2014497256 modified "2023-09-29" @default.
• W2014497256 title "Effect of Kinematic Parameters and Their Coupling Relationships on Global Uniformity of Chemical-Mechanical Polishing" @default.
• W2014497256 cites W1983665326 @default.
• W2014497256 cites W1993374814 @default.
• W2014497256 cites W2023918991 @default.
• W2014497256 cites W2024780635 @default.
• W2014497256 cites W2029371175 @default.
• W2014497256 cites W2044030655 @default.
• W2014497256 cites W2046781439 @default.
• W2014497256 cites W2048854220 @default.
• W2014497256 cites W2051927374 @default.
• W2014497256 cites W2052651660 @default.
• W2014497256 cites W2072683894 @default.
• W2014497256 cites W2089455109 @default.
• W2014497256 cites W2099199122 @default.
• W2014497256 cites W2102444668 @default.
• W2014497256 cites W2108861471 @default.
• W2014497256 cites W2127767984 @default.
• W2014497256 cites W2128088017 @default.
• W2014497256 cites W2158481096 @default.
• W2014497256 cites W2163484656 @default.
• W2014497256 doi "https://doi.org/10.1109/tsm.2012.2190432" @default.
• W2014497256 hasPublicationYear "2012" @default.
• W2014497256 type Work @default.
• W2014497256 sameAs 2014497256 @default.
• W2014497256 citedByCount "17" @default.
• W2014497256 countsByYear W20144972562013 @default.
• W2014497256 countsByYear W20144972562014 @default.
• W2014497256 countsByYear W20144972562017 @default.
• W2014497256 countsByYear W20144972562018 @default.
• W2014497256 countsByYear W20144972562020 @default.
• W2014497256 countsByYear W20144972562021 @default.
• W2014497256 countsByYear W20144972562023 @default.
• W2014497256 crossrefType "journal-article" @default.
• W2014497256 hasAuthorship W2014497256A5003876568 @default.
• W2014497256 hasAuthorship W2014497256A5010026629 @default.
• W2014497256 hasAuthorship W2014497256A5021955006 @default.
• W2014497256 hasAuthorship W2014497256A5090373659 @default.
• W2014497256 hasConcept C119599485 @default.
• W2014497256 hasConcept C121332964 @default.
• W2014497256 hasConcept C127413603 @default.
• W2014497256 hasConcept C131584629 @default.
• W2014497256 hasConcept C138113353 @default.
• W2014497256 hasConcept C160671074 @default.
• W2014497256 hasConcept C171250308 @default.
• W2014497256 hasConcept C180088628 @default.
• W2014497256 hasConcept C184720557 @default.
• W2014497256 hasConcept C192562407 @default.
• W2014497256 hasConcept C2524010 @default.
• W2014497256 hasConcept C33923547 @default.
• W2014497256 hasConcept C39920418 @default.
• W2014497256 hasConcept C74650414 @default.
• W2014497256 hasConcept C78519656 @default.
• W2014497256 hasConceptScore W2014497256C119599485 @default.
• W2014497256 hasConceptScore W2014497256C121332964 @default.
• W2014497256 hasConceptScore W2014497256C127413603 @default.
• W2014497256 hasConceptScore W2014497256C131584629 @default.
• W2014497256 hasConceptScore W2014497256C138113353 @default.
• W2014497256 hasConceptScore W2014497256C160671074 @default.
• W2014497256 hasConceptScore W2014497256C171250308 @default.
• W2014497256 hasConceptScore W2014497256C180088628 @default.
• W2014497256 hasConceptScore W2014497256C184720557 @default.
• W2014497256 hasConceptScore W2014497256C192562407 @default.
• W2014497256 hasConceptScore W2014497256C2524010 @default.
• W2014497256 hasConceptScore W2014497256C33923547 @default.
• W2014497256 hasConceptScore W2014497256C39920418 @default.
• W2014497256 hasConceptScore W2014497256C74650414 @default.
• W2014497256 hasConceptScore W2014497256C78519656 @default.
• W2014497256 hasIssue "3" @default.
• W2014497256 hasLocation W20144972561 @default.
• W2014497256 hasOpenAccess W2014497256 @default.
• W2014497256 hasPrimaryLocation W20144972561 @default.
• W2014497256 hasRelatedWork W1530515008 @default.
• W2014497256 hasRelatedWork W1987571941 @default.
• W2014497256 hasRelatedWork W2014497256 @default.
• W2014497256 hasRelatedWork W2030673534 @default.
• W2014497256 hasRelatedWork W2058666584 @default.
• W2014497256 hasRelatedWork W2109659628 @default.
• W2014497256 hasRelatedWork W2335316114 @default.
• W2014497256 hasRelatedWork W2348452527 @default.
• W2014497256 hasRelatedWork W2385996032 @default.
• W2014497256 hasRelatedWork W2608458191 @default.
• W2014497256 hasVolume "25" @default.
• W2014497256 isParatext "false" @default.
• W2014497256 isRetracted "false" @default.
• W2014497256 magId "2014497256" @default.
• W2014497256 workType "article" @default.