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- W2014519786 abstract "Precise impedance matching in RF circuits and wide-range tuning on wireless communication equipment require variable inductors. We propose a new type of on-chip micro-variable inductor fabricated using MEMS technology. The inductor is a conical coil and has an inductance of a few nH. The coil height can be changed from zero to several hundred micrometers. The inductance value varies according to the height, which can be determined arbitrarily either at fabrication or after fabrication. Thin film metallic glass, a new MEMS material, was used to realize the conical coil. The measured and simulated electrical characteristics (S11 parameter) indicate that this inductor can be used at 50 MHz to 16 GHz. The relationship between the inductance and the height indicates that the tuning range of the inductance is 3.64 to 3.75 nH at 2 GHz." @default.
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- W2014519786 date "2003-06-01" @default.
- W2014519786 modified "2023-09-27" @default.
- W2014519786 title "Fabrication and evaluation of an on-chip micro-variable inductor" @default.
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- W2014519786 doi "https://doi.org/10.1016/s0167-9317(03)00117-5" @default.
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