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- W2014522749 endingPage "166" @default.
- W2014522749 startingPage "159" @default.
- W2014522749 abstract "Abstract Two years of operation of the Series III Implanter have revealed the full potential of this machine. The arsenic and phosphorus performance of this machine has greatly exceeded the initial 4 mA design criterion and 8 mA beams of these elements are readily obtainable. The boron beam currents are very dependent upon source history, but 1.2 mA is always available and 3 mA can be obtained from a well conditioned source. The single gap post-acceleration system has proved very successful, a particular advantage over multi-gap tubes being the 100% beam transmission for any post-acceleration voltage and milliampere beams. The processor system consists of a large capacity (54–3″. 27–4″, 18–5″ or 9–6″ silicon wafers) racetrack carousel which gives a mechanical scan free of geometric errors for wafers up to 61/2″ diameter. The wafers are mounted on plates with a clamping technique designed for use with an automatic loading system. The large implantation area (approximately 4,000 cm2) minimizes the temperature rise during implantation. The large beam area (approximately 25 cm2 at the carousel) minimizes the pulse heating effect as the wafers sweep through the beam." @default.
- W2014522749 created "2016-06-24" @default.
- W2014522749 creator A5012568017 @default.
- W2014522749 date "1979-01-01" @default.
- W2014522749 modified "2023-09-27" @default.
- W2014522749 title "The performance of the series III 200kv high current industrial ion implanter" @default.
- W2014522749 cites W1973873213 @default.
- W2014522749 cites W1982457926 @default.
- W2014522749 cites W2030602509 @default.
- W2014522749 doi "https://doi.org/10.1080/00337577908245989" @default.
- W2014522749 hasPublicationYear "1979" @default.
- W2014522749 type Work @default.
- W2014522749 sameAs 2014522749 @default.
- W2014522749 citedByCount "6" @default.
- W2014522749 crossrefType "journal-article" @default.
- W2014522749 hasAuthorship W2014522749A5012568017 @default.
- W2014522749 hasConcept C117896860 @default.
- W2014522749 hasConcept C119599485 @default.
- W2014522749 hasConcept C120665830 @default.
- W2014522749 hasConcept C121332964 @default.
- W2014522749 hasConcept C122802935 @default.
- W2014522749 hasConcept C127413603 @default.
- W2014522749 hasConcept C145148216 @default.
- W2014522749 hasConcept C147120987 @default.
- W2014522749 hasConcept C160671074 @default.
- W2014522749 hasConcept C165801399 @default.
- W2014522749 hasConcept C168834538 @default.
- W2014522749 hasConcept C178790620 @default.
- W2014522749 hasConcept C185592680 @default.
- W2014522749 hasConcept C192562407 @default.
- W2014522749 hasConcept C41823505 @default.
- W2014522749 hasConcept C49040817 @default.
- W2014522749 hasConcept C62520636 @default.
- W2014522749 hasConcept C74650414 @default.
- W2014522749 hasConcept C78519656 @default.
- W2014522749 hasConcept C84111939 @default.
- W2014522749 hasConcept C95312477 @default.
- W2014522749 hasConceptScore W2014522749C117896860 @default.
- W2014522749 hasConceptScore W2014522749C119599485 @default.
- W2014522749 hasConceptScore W2014522749C120665830 @default.
- W2014522749 hasConceptScore W2014522749C121332964 @default.
- W2014522749 hasConceptScore W2014522749C122802935 @default.
- W2014522749 hasConceptScore W2014522749C127413603 @default.
- W2014522749 hasConceptScore W2014522749C145148216 @default.
- W2014522749 hasConceptScore W2014522749C147120987 @default.
- W2014522749 hasConceptScore W2014522749C160671074 @default.
- W2014522749 hasConceptScore W2014522749C165801399 @default.
- W2014522749 hasConceptScore W2014522749C168834538 @default.
- W2014522749 hasConceptScore W2014522749C178790620 @default.
- W2014522749 hasConceptScore W2014522749C185592680 @default.
- W2014522749 hasConceptScore W2014522749C192562407 @default.
- W2014522749 hasConceptScore W2014522749C41823505 @default.
- W2014522749 hasConceptScore W2014522749C49040817 @default.
- W2014522749 hasConceptScore W2014522749C62520636 @default.
- W2014522749 hasConceptScore W2014522749C74650414 @default.
- W2014522749 hasConceptScore W2014522749C78519656 @default.
- W2014522749 hasConceptScore W2014522749C84111939 @default.
- W2014522749 hasConceptScore W2014522749C95312477 @default.
- W2014522749 hasIssue "1-4" @default.
- W2014522749 hasLocation W20145227491 @default.
- W2014522749 hasOpenAccess W2014522749 @default.
- W2014522749 hasPrimaryLocation W20145227491 @default.
- W2014522749 hasRelatedWork W1558224663 @default.
- W2014522749 hasRelatedWork W2005108522 @default.
- W2014522749 hasRelatedWork W2014522749 @default.
- W2014522749 hasRelatedWork W2034522376 @default.
- W2014522749 hasRelatedWork W2085015981 @default.
- W2014522749 hasRelatedWork W2098943446 @default.
- W2014522749 hasRelatedWork W2118394980 @default.
- W2014522749 hasRelatedWork W2134345634 @default.
- W2014522749 hasRelatedWork W278009467 @default.
- W2014522749 hasRelatedWork W2899084033 @default.
- W2014522749 hasVolume "44" @default.
- W2014522749 isParatext "false" @default.
- W2014522749 isRetracted "false" @default.
- W2014522749 magId "2014522749" @default.
- W2014522749 workType "article" @default.