FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014547897> ?p ?o ?g. }

• W2014547897 endingPage "H287" @default.
• W2014547897 startingPage "H287" @default.
• W2014547897 abstract "In chemical mechanical planarization, abrasive particles are pushed onto a wafer by a deformable pad. In addition to the pad–particle contact force, surface forces also act between the wafer and the particles. Experimental studies indicate the significance of slurry pH and particle size on the material removal rate (MRR). In this work, a model for MRR, including the contact mechanics of multiple particles caught in the interface of a rough, porous, and deformable pad and a rigid wafer, including the influences of van der Waals and double-layer forces, is introduced. The effects of surface forces on MRR were investigated for different applied pressures, pad elastic moduli, particle sizes, molar concentrations of ions, and zeta potentials of the wafer and particles. The attractive van der Waals forces increase the MRR, while the double-layer forces, calculated to be repulsive, lower the MRR. The relative magnitude of surface forces compared to the pad–particle force increases with a smaller particle size and a pad elastic modulus. The experimental trends for the variation in MRR with slurry pH were predicted well by the model when the variation in the zeta potential of the wafer and particles with respect to slurry pH is considered." @default.
• W2014547897 created "2016-06-24" @default.
• W2014547897 creator A5046467734 @default.
• W2014547897 creator A5061008804 @default.
• W2014547897 date "2010-01-01" @default.
• W2014547897 modified "2023-10-16" @default.
• W2014547897 title "Effects of Surface Forces on Material Removal Rate in Chemical Mechanical Planarization" @default.
• W2014547897 cites W1499270134 @default.
• W2014547897 cites W1981890265 @default.
• W2014547897 cites W1982103622 @default.
• W2014547897 cites W1984628192 @default.
• W2014547897 cites W1987185684 @default.
• W2014547897 cites W1989631256 @default.
• W2014547897 cites W1993637311 @default.
• W2014547897 cites W1996418063 @default.
• W2014547897 cites W2003968098 @default.
• W2014547897 cites W2004992174 @default.
• W2014547897 cites W2006245540 @default.
• W2014547897 cites W2013479077 @default.
• W2014547897 cites W2013754301 @default.
• W2014547897 cites W2022324976 @default.
• W2014547897 cites W2027558267 @default.
• W2014547897 cites W2031176887 @default.
• W2014547897 cites W2046264839 @default.
• W2014547897 cites W2063571518 @default.
• W2014547897 cites W2069656846 @default.
• W2014547897 cites W2070372443 @default.
• W2014547897 cites W2078261409 @default.
• W2014547897 cites W2081405646 @default.
• W2014547897 cites W2089738059 @default.
• W2014547897 cites W2090583421 @default.
• W2014547897 cites W2094398328 @default.
• W2014547897 cites W2094693730 @default.
• W2014547897 cites W2099278477 @default.
• W2014547897 cites W2127582562 @default.
• W2014547897 cites W2130668009 @default.
• W2014547897 cites W2143020502 @default.
• W2014547897 cites W2143655111 @default.
• W2014547897 cites W2145296914 @default.
• W2014547897 cites W2149866454 @default.
• W2014547897 cites W2164661885 @default.
• W2014547897 cites W2200285409 @default.
• W2014547897 cites W2334781656 @default.
• W2014547897 cites W80735681 @default.
• W2014547897 doi "https://doi.org/10.1149/1.3275721" @default.
• W2014547897 hasPublicationYear "2010" @default.
• W2014547897 type Work @default.
• W2014547897 sameAs 2014547897 @default.
• W2014547897 citedByCount "7" @default.
• W2014547897 countsByYear W20145478972015 @default.
• W2014547897 countsByYear W20145478972017 @default.
• W2014547897 countsByYear W20145478972018 @default.
• W2014547897 countsByYear W20145478972020 @default.
• W2014547897 countsByYear W20145478972021 @default.
• W2014547897 crossrefType "journal-article" @default.
• W2014547897 hasAuthorship W2014547897A5046467734 @default.
• W2014547897 hasAuthorship W2014547897A5061008804 @default.
• W2014547897 hasBestOaLocation W20145478971 @default.
• W2014547897 hasConcept C111368507 @default.
• W2014547897 hasConcept C121332964 @default.
• W2014547897 hasConcept C126061179 @default.
• W2014547897 hasConcept C127313418 @default.
• W2014547897 hasConcept C147789679 @default.
• W2014547897 hasConcept C151827568 @default.
• W2014547897 hasConcept C155672457 @default.
• W2014547897 hasConcept C159985019 @default.
• W2014547897 hasConcept C160671074 @default.
• W2014547897 hasConcept C171250308 @default.
• W2014547897 hasConcept C178790620 @default.
• W2014547897 hasConcept C180088628 @default.
• W2014547897 hasConcept C185592680 @default.
• W2014547897 hasConcept C187530423 @default.
• W2014547897 hasConcept C192562407 @default.
• W2014547897 hasConcept C2778517922 @default.
• W2014547897 hasConcept C2779227376 @default.
• W2014547897 hasConcept C2780957350 @default.
• W2014547897 hasConcept C32909587 @default.
• W2014547897 hasConcept C43486711 @default.
• W2014547897 hasConcept C57879066 @default.
• W2014547897 hasConcept C74650414 @default.
• W2014547897 hasConcept C81302111 @default.
• W2014547897 hasConcept C86181022 @default.
• W2014547897 hasConcept C94293008 @default.
• W2014547897 hasConceptScore W2014547897C111368507 @default.
• W2014547897 hasConceptScore W2014547897C121332964 @default.
• W2014547897 hasConceptScore W2014547897C126061179 @default.
• W2014547897 hasConceptScore W2014547897C127313418 @default.
• W2014547897 hasConceptScore W2014547897C147789679 @default.
• W2014547897 hasConceptScore W2014547897C151827568 @default.
• W2014547897 hasConceptScore W2014547897C155672457 @default.
• W2014547897 hasConceptScore W2014547897C159985019 @default.
• W2014547897 hasConceptScore W2014547897C160671074 @default.
• W2014547897 hasConceptScore W2014547897C171250308 @default.
• W2014547897 hasConceptScore W2014547897C178790620 @default.
• W2014547897 hasConceptScore W2014547897C180088628 @default.
• W2014547897 hasConceptScore W2014547897C185592680 @default.
• W2014547897 hasConceptScore W2014547897C187530423 @default.
• W2014547897 hasConceptScore W2014547897C192562407 @default.

• next