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- W2014583091 abstract "The computer-controlled electron cyclotron resonance plasma enhanced chemical vapor deposition of SiO<SUB>x</SUB>N<SUB>y</SUB> was used for the manufacturing of optical interference coatings with inhomogeneous and traditional multilayer refractive index profiles. Such complex structures as triple-band rugate optical interference filters and graded refractive index antireflection coatings were grown. The design of coatings was performed using measured optical constants of the SiO<SUB>x</SUB>N<SUB>y</SUB>-system." @default.
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- W2014583091 date "1996-08-19" @default.
- W2014583091 modified "2023-09-26" @default.
- W2014583091 title "Deposition of conventional and gradient optical coatings by ECR plasma-enhanced chemical vapor deposition" @default.
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- W2014583091 doi "https://doi.org/10.1117/12.246840" @default.
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