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- W2014597807 abstract "The energy distribution of ions hitting the cathode of dc and pulsed dc discharges were investigated under conditions typically for PACVD and plasma diffusion treatment. Energy and mass analysis was performed, using a two-stage differentially pumped plasma monitor. Gas atmospheres containing nitrogen, hydrogen and argon were investigated in the pressure range of a few mbar. The observed amount of ions with energies exceeding the sputtering threshold is considerably higher than theoretically expected. The density of ions striking the cathode in a low frequency pulsed discharge has proved to be strongly dependent on the average discharge current, whereas the operating voltage mainly affected their energy distribution functions." @default.
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- W2014597807 date "1993-05-01" @default.
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- W2014597807 title "Ion energy distribution measurements in glow discharges" @default.
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- W2014597807 doi "https://doi.org/10.1016/0022-3115(93)90318-s" @default.
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