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- W2014652013 abstract "To address issues associated with continual scaling of the International Technology Roadmap for Semiconductors (ITRS) [1] to follow Moore's Law, MOSFETs with high mobility channel materials are now being seriously considered. As a result, there has been a significant expansion in research into III-V MOSFETs as a potential n-channel device solution. For ultimate CMOS exploitation, self-aligned III-V MOSFETs with sub-20 nm critical dimensions will have to be realized using silicon compatible process flows. This paper reviews the current status of III-V MOSFET research from the perspective of silicon ULSI process compatibility." @default.
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- W2014652013 date "2009-09-25" @default.
- W2014652013 modified "2023-09-26" @default.
- W2014652013 title "Development of III-V MOSFET Process Modules Compatible with Silicon ULSI Manufacture" @default.
- W2014652013 doi "https://doi.org/10.1149/1.3203975" @default.
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