Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014681712> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2014681712 endingPage "555" @default.
- W2014681712 startingPage "548" @default.
- W2014681712 abstract "A WSi 0.4 cosputtering process has been developed to provide a gate metallization for GaAs self-aligned MESFET devices. The deposition parameters were optimized to produce films with good interface stability during 800°C n + implant activation anneal. The importance of the amorphous structure to serve as a good diffusion barrier is emphasized. Various analytical methods are employed to characterize the gate metal/GaAs interface. I–V diode measurements were used to characterize contact electrical properties such as barrier height and ideality factor. MESFET's with a very shallow channel implant (10 keV) were fabricated with a K-value of 510 mS/V·mm, thus the good stability of the Schottky contact to GaAs was confirmed." @default.
- W2014681712 created "2016-06-24" @default.
- W2014681712 creator A5026324153 @default.
- W2014681712 creator A5029673217 @default.
- W2014681712 creator A5060149283 @default.
- W2014681712 creator A5090441542 @default.
- W2014681712 date "1989-09-01" @default.
- W2014681712 modified "2023-09-27" @default.
- W2014681712 title "Characterization of WSix gate metal process for GaAs MESFET's" @default.
- W2014681712 cites W1987964251 @default.
- W2014681712 cites W1999602479 @default.
- W2014681712 cites W1999719176 @default.
- W2014681712 cites W2000131342 @default.
- W2014681712 cites W2007640019 @default.
- W2014681712 cites W2011182272 @default.
- W2014681712 cites W2029021689 @default.
- W2014681712 cites W2038478593 @default.
- W2014681712 cites W2043134065 @default.
- W2014681712 cites W2044779621 @default.
- W2014681712 cites W2062168691 @default.
- W2014681712 cites W2081011577 @default.
- W2014681712 cites W2088763425 @default.
- W2014681712 cites W2093547401 @default.
- W2014681712 cites W2126951842 @default.
- W2014681712 cites W3021238137 @default.
- W2014681712 cites W642383172 @default.
- W2014681712 doi "https://doi.org/10.1016/0169-4332(89)90577-1" @default.
- W2014681712 hasPublicationYear "1989" @default.
- W2014681712 type Work @default.
- W2014681712 sameAs 2014681712 @default.
- W2014681712 citedByCount "3" @default.
- W2014681712 crossrefType "journal-article" @default.
- W2014681712 hasAuthorship W2014681712A5026324153 @default.
- W2014681712 hasAuthorship W2014681712A5029673217 @default.
- W2014681712 hasAuthorship W2014681712A5060149283 @default.
- W2014681712 hasAuthorship W2014681712A5090441542 @default.
- W2014681712 hasConcept C119599485 @default.
- W2014681712 hasConcept C123671423 @default.
- W2014681712 hasConcept C127413603 @default.
- W2014681712 hasConcept C134123091 @default.
- W2014681712 hasConcept C145598152 @default.
- W2014681712 hasConcept C16115445 @default.
- W2014681712 hasConcept C165801399 @default.
- W2014681712 hasConcept C171250308 @default.
- W2014681712 hasConcept C172385210 @default.
- W2014681712 hasConcept C192562407 @default.
- W2014681712 hasConcept C205200001 @default.
- W2014681712 hasConcept C2779227376 @default.
- W2014681712 hasConcept C49040817 @default.
- W2014681712 hasConcept C78434282 @default.
- W2014681712 hasConceptScore W2014681712C119599485 @default.
- W2014681712 hasConceptScore W2014681712C123671423 @default.
- W2014681712 hasConceptScore W2014681712C127413603 @default.
- W2014681712 hasConceptScore W2014681712C134123091 @default.
- W2014681712 hasConceptScore W2014681712C145598152 @default.
- W2014681712 hasConceptScore W2014681712C16115445 @default.
- W2014681712 hasConceptScore W2014681712C165801399 @default.
- W2014681712 hasConceptScore W2014681712C171250308 @default.
- W2014681712 hasConceptScore W2014681712C172385210 @default.
- W2014681712 hasConceptScore W2014681712C192562407 @default.
- W2014681712 hasConceptScore W2014681712C205200001 @default.
- W2014681712 hasConceptScore W2014681712C2779227376 @default.
- W2014681712 hasConceptScore W2014681712C49040817 @default.
- W2014681712 hasConceptScore W2014681712C78434282 @default.
- W2014681712 hasIssue "1-4" @default.
- W2014681712 hasLocation W20146817121 @default.
- W2014681712 hasOpenAccess W2014681712 @default.
- W2014681712 hasPrimaryLocation W20146817121 @default.
- W2014681712 hasRelatedWork W1966714478 @default.
- W2014681712 hasRelatedWork W1972411039 @default.
- W2014681712 hasRelatedWork W1976058171 @default.
- W2014681712 hasRelatedWork W2009250851 @default.
- W2014681712 hasRelatedWork W2085708621 @default.
- W2014681712 hasRelatedWork W2086756978 @default.
- W2014681712 hasRelatedWork W2170019241 @default.
- W2014681712 hasRelatedWork W3004791968 @default.
- W2014681712 hasRelatedWork W3120723223 @default.
- W2014681712 hasRelatedWork W97950544 @default.
- W2014681712 hasVolume "38" @default.
- W2014681712 isParatext "false" @default.
- W2014681712 isRetracted "false" @default.
- W2014681712 magId "2014681712" @default.
- W2014681712 workType "article" @default.