FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014696529> ?p ?o ?g. }

• W2014696529 endingPage "01AB04" @default.
• W2014696529 startingPage "01AB04" @default.
• W2014696529 abstract "UV-cured photoresist is applied to the delay masking process to realize a multiple-height microstructure for the first time. Although the UV-cured photoresist is a soft mask, its material property becomes stable against resist thinner and UV exposure. A layered resist pattern can be realized by stacking normal photoresist on the UV-cured photoresist. The UV curing increases the glass transition temperature from 120 to 160 °C. By controlling the temperature, the normal photoresist can be ashed twice as fast as the UV-cured photoresist. This selectivity can be combined with the deep reactive ion etching of Si, and a microstructure having three different etching depths is realized, thus forming a micromirror. The multiple-height structure is advantageous for reducing the inertia of the mirror plate. For the same rotational spring constant, the micromirror has a higher resonant frequency, which is required for realizing higher-resolution laser displays." @default.
• W2014696529 created "2016-06-24" @default.
• W2014696529 creator A5006676797 @default.
• W2014696529 creator A5015217042 @default.
• W2014696529 creator A5015379691 @default.
• W2014696529 creator A5020588233 @default.
• W2014696529 creator A5049780574 @default.
• W2014696529 creator A5068162087 @default.
• W2014696529 date "2012-01-01" @default.
• W2014696529 modified "2023-09-27" @default.
• W2014696529 title "Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing" @default.
• W2014696529 cites W1966548041 @default.
• W2014696529 cites W1977712635 @default.
• W2014696529 cites W1979573591 @default.
• W2014696529 cites W1981534742 @default.
• W2014696529 cites W1993769454 @default.
• W2014696529 cites W1998167505 @default.
• W2014696529 cites W2028894280 @default.
• W2014696529 cites W2052630778 @default.
• W2014696529 cites W2058879405 @default.
• W2014696529 cites W2091646679 @default.
• W2014696529 cites W2100725972 @default.
• W2014696529 cites W2109348766 @default.
• W2014696529 cites W2117053651 @default.
• W2014696529 cites W2129549043 @default.
• W2014696529 cites W2132756315 @default.
• W2014696529 cites W2137437969 @default.
• W2014696529 cites W2157321441 @default.
• W2014696529 cites W2168102100 @default.
• W2014696529 cites W2169258629 @default.
• W2014696529 cites W2323541936 @default.
• W2014696529 cites W2093682199 @default.
• W2014696529 doi "https://doi.org/10.1143/jjap.51.01ab04" @default.
• W2014696529 hasPublicationYear "2012" @default.
• W2014696529 type Work @default.
• W2014696529 sameAs 2014696529 @default.
• W2014696529 citedByCount "3" @default.
• W2014696529 countsByYear W20146965292012 @default.
• W2014696529 countsByYear W20146965292013 @default.
• W2014696529 crossrefType "journal-article" @default.
• W2014696529 hasAuthorship W2014696529A5006676797 @default.
• W2014696529 hasAuthorship W2014696529A5015217042 @default.
• W2014696529 hasAuthorship W2014696529A5015379691 @default.
• W2014696529 hasAuthorship W2014696529A5020588233 @default.
• W2014696529 hasAuthorship W2014696529A5049780574 @default.
• W2014696529 hasAuthorship W2014696529A5068162087 @default.
• W2014696529 hasConcept C100460472 @default.
• W2014696529 hasConcept C105487726 @default.
• W2014696529 hasConcept C120665830 @default.
• W2014696529 hasConcept C121332964 @default.
• W2014696529 hasConcept C130472188 @default.
• W2014696529 hasConcept C132976073 @default.
• W2014696529 hasConcept C134406635 @default.
• W2014696529 hasConcept C159985019 @default.
• W2014696529 hasConcept C178790620 @default.
• W2014696529 hasConcept C185592680 @default.
• W2014696529 hasConcept C192562407 @default.
• W2014696529 hasConcept C204223013 @default.
• W2014696529 hasConcept C2776798109 @default.
• W2014696529 hasConcept C2777682490 @default.
• W2014696529 hasConcept C2779227376 @default.
• W2014696529 hasConcept C33347731 @default.
• W2014696529 hasConcept C49040817 @default.
• W2014696529 hasConcept C53524968 @default.
• W2014696529 hasConcept C87976508 @default.
• W2014696529 hasConceptScore W2014696529C100460472 @default.
• W2014696529 hasConceptScore W2014696529C105487726 @default.
• W2014696529 hasConceptScore W2014696529C120665830 @default.
• W2014696529 hasConceptScore W2014696529C121332964 @default.
• W2014696529 hasConceptScore W2014696529C130472188 @default.
• W2014696529 hasConceptScore W2014696529C132976073 @default.
• W2014696529 hasConceptScore W2014696529C134406635 @default.
• W2014696529 hasConceptScore W2014696529C159985019 @default.
• W2014696529 hasConceptScore W2014696529C178790620 @default.
• W2014696529 hasConceptScore W2014696529C185592680 @default.
• W2014696529 hasConceptScore W2014696529C192562407 @default.
• W2014696529 hasConceptScore W2014696529C204223013 @default.
• W2014696529 hasConceptScore W2014696529C2776798109 @default.
• W2014696529 hasConceptScore W2014696529C2777682490 @default.
• W2014696529 hasConceptScore W2014696529C2779227376 @default.
• W2014696529 hasConceptScore W2014696529C33347731 @default.
• W2014696529 hasConceptScore W2014696529C49040817 @default.
• W2014696529 hasConceptScore W2014696529C53524968 @default.
• W2014696529 hasConceptScore W2014696529C87976508 @default.
• W2014696529 hasIssue "1S" @default.
• W2014696529 hasLocation W20146965291 @default.
• W2014696529 hasOpenAccess W2014696529 @default.
• W2014696529 hasPrimaryLocation W20146965291 @default.
• W2014696529 hasRelatedWork W1538884143 @default.
• W2014696529 hasRelatedWork W1970429514 @default.
• W2014696529 hasRelatedWork W2014696529 @default.
• W2014696529 hasRelatedWork W2017559628 @default.
• W2014696529 hasRelatedWork W2021685851 @default.
• W2014696529 hasRelatedWork W2055608478 @default.
• W2014696529 hasRelatedWork W2099612599 @default.
• W2014696529 hasRelatedWork W2751294986 @default.
• W2014696529 hasRelatedWork W3007549791 @default.
• W2014696529 hasRelatedWork W4241780667 @default.

• next