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- W2014698369 abstract "A deposition system is discussed which incorporates a mechanism capable of cycling many substrates through a deposition process under controlled conditions. The construction of the mechanism and its operation during the deposition process are described in detail. A non-fractionating evaporation source compatible with the mechanism is described together with presentation of composition data characteristic of the source. Also described is the construction of a magnet capable of producing a uniform localized field over the volume occupied by the substrates." @default.
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- W2014698369 date "1964-01-01" @default.
- W2014698369 modified "2023-09-23" @default.
- W2014698369 title "An automated experimental vacuum deposition system" @default.
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- W2014698369 doi "https://doi.org/10.1016/0042-207x(64)90779-1" @default.
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