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• W2014714669 abstract "Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs-laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three-dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples." @default.
• W2014714669 created "2016-06-24" @default.
• W2014714669 creator A5018595029 @default.
• W2014714669 creator A5052965728 @default.
• W2014714669 creator A5076935478 @default.
• W2014714669 date "2010-04-23" @default.
• W2014714669 modified "2023-10-16" @default.
• W2014714669 title "Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips" @default.
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• W2014714669 doi "https://doi.org/10.1002/lpor.200810074" @default.
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