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- W2014739865 abstract "In order to acquire high reflectance, how to select the thickness d<SUB>H</SUB> and d<SUB>L</SUB> of the high and low atomic numbers materials should be considered first of all in the design of soft x-ray multi-layer. This paper introduced a simple design method based on matrix method. In the design process of a multi-layer mirror using Mo/Si at (lambda) equals 13.1 nm and normal incidence, its reflectance reaches 67.0 percent when layers are 30. Compared with other method, although its reflectance is a bit lower, it is a simple and practical method." @default.
- W2014739865 created "2016-06-24" @default.
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- W2014739865 date "2000-10-05" @default.
- W2014739865 modified "2023-10-14" @default.
- W2014739865 title "Succinct design method of soft x-ray multilayer mirror" @default.
- W2014739865 doi "https://doi.org/10.1117/12.401778" @default.
- W2014739865 hasPublicationYear "2000" @default.
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