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- W2014753657 abstract "The adhesion of plasma-deposited TiN from TiCl4H2N2 gas mixtures on AISI M2 (Werkstoffnr. 1.3343) steel substrates can be improved by proper cleaning of the substrates in a non-corrosive solution such as an aliphatic hydrocarbon (dodecane). From the deposition parameters, such as the substrate temperature, pressure, r.f. power and respective gas flows, the temperature appears to be the most influential parameter for the adhesion. The removal or reduction of metal oxides present on the surface by increasing the substrate temperature and/or in situ plasma etching in H2 enhances the adhesion, as indicated by the increased critical load Lc in a scratch adhesion test. The “cleaned” surface can be made more resistant to the aggressive discharge by treating the surface in an N2 or N2H2 discharge. The nitrides formed on the surface, one of which is Fe2N, also influence the nucleation and growth mechanism of TiN, which leads to a more random orientation of the TiN crystallites. The residual stress in TiN films, deposited on M2 steel substrates pre-treated in an N2 discharge, appears to be lower than the stress in TiN films deposited on a steel surface which has not been pre-treated in an N2 discharge. As a result a substantial improvement is obtained in critical load. Routine Lc values of up to 50 N have been obtained for TiN coatings with a thickness of about 4.5 μm." @default.
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- W2014753657 title "On the adhesion of plasma-deposited TiN on M2 steel" @default.
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- W2014753657 doi "https://doi.org/10.1016/0921-5093(91)90601-i" @default.
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