Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014788191> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2014788191 endingPage "412" @default.
- W2014788191 startingPage "408" @default.
- W2014788191 abstract "Abstract Surface-wave-sustained plasma (SWP) is a low-pressure, high-density plasma. Applying this technique, it is promising to prepare hydrogen-free diamond-like carbon (DLC) films with excellent characteristics by physical vapor deposition (PVD) method. However, at present, the films' application is restricted in some degree because of the lack of study on the relationship between the SWP properties and film formation. Therefore, it is necessary to investigate the plasma properties under the conditions of preparing DLC films. The conventional plasma is excited along the surface of a dielectric material (such as a quartz tube). However, in this paper, we developed a new SWP system—the plasma was excited along a conductive rod (graphite) by microwaves with a frequency of 2.45 GHz. The simple structure, without magnetic fields around the chamber wall, was shown in this paper. The fundamental theories of plasma diagnostic were presented, and plasma properties were studied with a Langmuir probe under the conditions of depositing DLC films by the PVD method. Plasma density, electron temperature, plasma potential and target current were measured at various experimental parameters such as gas pressure, microwave power, and so on. As a result, it was proved that plasma properties are greatly affected by the microwave power, the target voltage and the argon gas pressure in chamber. At the same time, the results indicated that this new system could obtain electron density as high as 10 11 –10 12 cm − 3 even at low pressure of 1 Pa." @default.
- W2014788191 created "2016-06-24" @default.
- W2014788191 creator A5006116815 @default.
- W2014788191 creator A5049479104 @default.
- W2014788191 creator A5052465407 @default.
- W2014788191 creator A5083197443 @default.
- W2014788191 date "2006-09-01" @default.
- W2014788191 modified "2023-10-17" @default.
- W2014788191 title "Plasma properties of a new surface-wave-sustained plasma source under the conditions of depositing DLC films" @default.
- W2014788191 cites W1965183335 @default.
- W2014788191 cites W1967719676 @default.
- W2014788191 cites W1968661561 @default.
- W2014788191 cites W1975684667 @default.
- W2014788191 cites W1988133629 @default.
- W2014788191 cites W2000439792 @default.
- W2014788191 cites W2003915013 @default.
- W2014788191 cites W2004405314 @default.
- W2014788191 cites W2025901317 @default.
- W2014788191 cites W2029618812 @default.
- W2014788191 cites W2032364690 @default.
- W2014788191 cites W2033968425 @default.
- W2014788191 cites W2036326078 @default.
- W2014788191 cites W2046294711 @default.
- W2014788191 cites W2053092659 @default.
- W2014788191 cites W2059904034 @default.
- W2014788191 cites W2062654303 @default.
- W2014788191 cites W2104632356 @default.
- W2014788191 cites W2472268579 @default.
- W2014788191 doi "https://doi.org/10.1016/j.surfcoat.2005.11.133" @default.
- W2014788191 hasPublicationYear "2006" @default.
- W2014788191 type Work @default.
- W2014788191 sameAs 2014788191 @default.
- W2014788191 citedByCount "7" @default.
- W2014788191 countsByYear W20147881912012 @default.
- W2014788191 countsByYear W20147881912014 @default.
- W2014788191 countsByYear W20147881912016 @default.
- W2014788191 countsByYear W20147881912020 @default.
- W2014788191 crossrefType "journal-article" @default.
- W2014788191 hasAuthorship W2014788191A5006116815 @default.
- W2014788191 hasAuthorship W2014788191A5049479104 @default.
- W2014788191 hasAuthorship W2014788191A5052465407 @default.
- W2014788191 hasAuthorship W2014788191A5083197443 @default.
- W2014788191 hasConcept C121332964 @default.
- W2014788191 hasConcept C159985019 @default.
- W2014788191 hasConcept C171250308 @default.
- W2014788191 hasConcept C19067145 @default.
- W2014788191 hasConcept C192562407 @default.
- W2014788191 hasConcept C62520636 @default.
- W2014788191 hasConcept C82706917 @default.
- W2014788191 hasConceptScore W2014788191C121332964 @default.
- W2014788191 hasConceptScore W2014788191C159985019 @default.
- W2014788191 hasConceptScore W2014788191C171250308 @default.
- W2014788191 hasConceptScore W2014788191C19067145 @default.
- W2014788191 hasConceptScore W2014788191C192562407 @default.
- W2014788191 hasConceptScore W2014788191C62520636 @default.
- W2014788191 hasConceptScore W2014788191C82706917 @default.
- W2014788191 hasIssue "1-2" @default.
- W2014788191 hasLocation W20147881911 @default.
- W2014788191 hasOpenAccess W2014788191 @default.
- W2014788191 hasPrimaryLocation W20147881911 @default.
- W2014788191 hasRelatedWork W1994103032 @default.
- W2014788191 hasRelatedWork W2011052271 @default.
- W2014788191 hasRelatedWork W2014315543 @default.
- W2014788191 hasRelatedWork W2051270029 @default.
- W2014788191 hasRelatedWork W2082293200 @default.
- W2014788191 hasRelatedWork W2137307547 @default.
- W2014788191 hasRelatedWork W2380293314 @default.
- W2014788191 hasRelatedWork W2943188944 @default.
- W2014788191 hasRelatedWork W4285802202 @default.
- W2014788191 hasRelatedWork W4317433637 @default.
- W2014788191 hasVolume "201" @default.
- W2014788191 isParatext "false" @default.
- W2014788191 isRetracted "false" @default.
- W2014788191 magId "2014788191" @default.
- W2014788191 workType "article" @default.