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- W2014802008 abstract "In this article, etching of subquarter-micron contact holes with a film structure of silicon dioxide (SiO2)/silicon nitride (Si3N4)/silicide (TiSix) in dual-frequency capacitively coupled plasmas is investigated. The etch process scheme here uses a highly selective chemistry to remove SiO2 film first, then the process switches to another chemistry with high etch selectivity of Si3N4-to-TiSix. The author found that the polymer film deposited inside contact holes during SiO2 etching severely degraded the selectivity of Si3N4-to-TiSix. This can cause open or high contact resistance. Different process integration schemes with the goal of increasing the etch selectivity of Si3N4-to-TiSix were initiated and developed. Electrical parametric data of contact chain resistance will be presented." @default.
- W2014802008 created "2016-06-24" @default.
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- W2014802008 date "1999-11-01" @default.
- W2014802008 modified "2023-09-25" @default.
- W2014802008 title "Novel process integration for reduction of subquarter-micron contact resistance" @default.
- W2014802008 doi "https://doi.org/10.1116/1.591131" @default.
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