Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014874887> ?p ?o ?g. }
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- W2014874887 endingPage "490" @default.
- W2014874887 startingPage "490" @default.
- W2014874887 abstract "We have studied a method to realize an optical spatial filter applicable to inspection systems for patterned silicon wafers by means of a phase-modulation filter. A simulated-annealing method can be used to design a one-dimensional binary phase spatial filter which effectively levels a periodic pattern corresponding to memory cells and so on. The optimum cost function is the maximum optical amplitude on the observation plane of the inspection system. The suitable binary phase ranges from 0.7π to 1.3π. Furthermore, leveling of a nonperiodic pattern corresponding to particles or defects can be avoided when the cells of the spatial filter which make no contribution to the leveling of the periodic pattern are set to have the same phase as that of the cell at the lowest spatial frequency. As a result, the nonperiodic patterns can be emphasized more than periodic patterns. To verify the applicability of the simulation, we fabricated the designed optical spatial filter on a quartz substrate by photolithography and reactive ion etching, and measured its characteristics. As a result, we have confirmed that the fabricated optical spatial filter has the same effect as that of the designed one." @default.
- W2014874887 created "2016-06-24" @default.
- W2014874887 creator A5006611650 @default.
- W2014874887 creator A5016662569 @default.
- W2014874887 creator A5087131715 @default.
- W2014874887 date "2000-02-01" @default.
- W2014874887 modified "2023-10-18" @default.
- W2014874887 title "Phase-Modulation Optical Spatial Filters Applicable to Inspection Systems for Patterned Silicon Wafers" @default.
- W2014874887 cites W2001319222 @default.
- W2014874887 cites W2013419608 @default.
- W2014874887 cites W2080578631 @default.
- W2014874887 cites W2159701861 @default.
- W2014874887 doi "https://doi.org/10.1143/jjap.39.490" @default.
- W2014874887 hasPublicationYear "2000" @default.
- W2014874887 type Work @default.
- W2014874887 sameAs 2014874887 @default.
- W2014874887 citedByCount "0" @default.
- W2014874887 crossrefType "journal-article" @default.
- W2014874887 hasAuthorship W2014874887A5006611650 @default.
- W2014874887 hasAuthorship W2014874887A5016662569 @default.
- W2014874887 hasAuthorship W2014874887A5087131715 @default.
- W2014874887 hasConcept C100460472 @default.
- W2014874887 hasConcept C100921725 @default.
- W2014874887 hasConcept C105487726 @default.
- W2014874887 hasConcept C106131492 @default.
- W2014874887 hasConcept C120665830 @default.
- W2014874887 hasConcept C121332964 @default.
- W2014874887 hasConcept C121475858 @default.
- W2014874887 hasConcept C130472188 @default.
- W2014874887 hasConcept C160671074 @default.
- W2014874887 hasConcept C171250308 @default.
- W2014874887 hasConcept C192562407 @default.
- W2014874887 hasConcept C2779227376 @default.
- W2014874887 hasConcept C31972630 @default.
- W2014874887 hasConcept C41008148 @default.
- W2014874887 hasConcept C44280652 @default.
- W2014874887 hasConcept C45613198 @default.
- W2014874887 hasConcept C49040817 @default.
- W2014874887 hasConcept C544956773 @default.
- W2014874887 hasConcept C62520636 @default.
- W2014874887 hasConceptScore W2014874887C100460472 @default.
- W2014874887 hasConceptScore W2014874887C100921725 @default.
- W2014874887 hasConceptScore W2014874887C105487726 @default.
- W2014874887 hasConceptScore W2014874887C106131492 @default.
- W2014874887 hasConceptScore W2014874887C120665830 @default.
- W2014874887 hasConceptScore W2014874887C121332964 @default.
- W2014874887 hasConceptScore W2014874887C121475858 @default.
- W2014874887 hasConceptScore W2014874887C130472188 @default.
- W2014874887 hasConceptScore W2014874887C160671074 @default.
- W2014874887 hasConceptScore W2014874887C171250308 @default.
- W2014874887 hasConceptScore W2014874887C192562407 @default.
- W2014874887 hasConceptScore W2014874887C2779227376 @default.
- W2014874887 hasConceptScore W2014874887C31972630 @default.
- W2014874887 hasConceptScore W2014874887C41008148 @default.
- W2014874887 hasConceptScore W2014874887C44280652 @default.
- W2014874887 hasConceptScore W2014874887C45613198 @default.
- W2014874887 hasConceptScore W2014874887C49040817 @default.
- W2014874887 hasConceptScore W2014874887C544956773 @default.
- W2014874887 hasConceptScore W2014874887C62520636 @default.
- W2014874887 hasIssue "2R" @default.
- W2014874887 hasLocation W20148748871 @default.
- W2014874887 hasOpenAccess W2014874887 @default.
- W2014874887 hasPrimaryLocation W20148748871 @default.
- W2014874887 hasRelatedWork W1965736130 @default.
- W2014874887 hasRelatedWork W1975330641 @default.
- W2014874887 hasRelatedWork W2014874887 @default.
- W2014874887 hasRelatedWork W2036928626 @default.
- W2014874887 hasRelatedWork W2059403583 @default.
- W2014874887 hasRelatedWork W2065186804 @default.
- W2014874887 hasRelatedWork W2074364995 @default.
- W2014874887 hasRelatedWork W2115611442 @default.
- W2014874887 hasRelatedWork W2325894594 @default.
- W2014874887 hasRelatedWork W3148186956 @default.
- W2014874887 hasVolume "39" @default.
- W2014874887 isParatext "false" @default.
- W2014874887 isRetracted "false" @default.
- W2014874887 magId "2014874887" @default.
- W2014874887 workType "article" @default.