Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014920403> ?p ?o ?g. }
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98
with 100 items per page.
- W2014920403 endingPage "1052" @default.
- W2014920403 startingPage "1048" @default.
- W2014920403 abstract "Laser micromachining has been proved to be a useful tool for the formation of microstructures in semiconductor and optical materials. It is also widely adopted for dicing of light-emitting diode chips. The authors propose a modified laser micromachining setup which enables three-dimensional structures to be formed. A mirror is inserted in the optical path between the focusing optics and the machining plane so that the beam strikes the sample at an oblique angle. By translating and/or rotating the sample as micromachining is carried out, various three-dimensional structures such as a pyramid or a conic section can be obtained. Trenches as small as 10 μm on sapphire have been realized with nanosecond ultraviolet laser pulses. Laser-induced damage, due to resolidification of the ablation melt, accumulates with increasing scans of the beam; it can be removed by chemical and mechanical treatment." @default.
- W2014920403 created "2016-06-24" @default.
- W2014920403 creator A5034218390 @default.
- W2014920403 creator A5076826015 @default.
- W2014920403 creator A5085637780 @default.
- W2014920403 date "2009-04-20" @default.
- W2014920403 modified "2023-10-17" @default.
- W2014920403 title "Laser micromachining of optical microstructures with inclined sidewall profile" @default.
- W2014920403 cites W1601036094 @default.
- W2014920403 cites W1965663042 @default.
- W2014920403 cites W1999882556 @default.
- W2014920403 cites W2003793075 @default.
- W2014920403 cites W2049493146 @default.
- W2014920403 cites W2049776283 @default.
- W2014920403 cites W2057161909 @default.
- W2014920403 cites W2108387862 @default.
- W2014920403 cites W2113295440 @default.
- W2014920403 cites W2127430674 @default.
- W2014920403 cites W2128796237 @default.
- W2014920403 doi "https://doi.org/10.1116/1.3117344" @default.
- W2014920403 hasPublicationYear "2009" @default.
- W2014920403 type Work @default.
- W2014920403 sameAs 2014920403 @default.
- W2014920403 citedByCount "18" @default.
- W2014920403 countsByYear W20149204032012 @default.
- W2014920403 countsByYear W20149204032013 @default.
- W2014920403 countsByYear W20149204032014 @default.
- W2014920403 countsByYear W20149204032015 @default.
- W2014920403 countsByYear W20149204032018 @default.
- W2014920403 countsByYear W20149204032019 @default.
- W2014920403 countsByYear W20149204032022 @default.
- W2014920403 crossrefType "journal-article" @default.
- W2014920403 hasAuthorship W2014920403A5034218390 @default.
- W2014920403 hasAuthorship W2014920403A5076826015 @default.
- W2014920403 hasAuthorship W2014920403A5085637780 @default.
- W2014920403 hasBestOaLocation W20149204032 @default.
- W2014920403 hasConcept C120665830 @default.
- W2014920403 hasConcept C121332964 @default.
- W2014920403 hasConcept C136525101 @default.
- W2014920403 hasConcept C142724271 @default.
- W2014920403 hasConcept C145667562 @default.
- W2014920403 hasConcept C160671074 @default.
- W2014920403 hasConcept C165013422 @default.
- W2014920403 hasConcept C191897082 @default.
- W2014920403 hasConcept C192562407 @default.
- W2014920403 hasConcept C204787440 @default.
- W2014920403 hasConcept C2777048131 @default.
- W2014920403 hasConcept C2778386843 @default.
- W2014920403 hasConcept C2779188808 @default.
- W2014920403 hasConcept C2780064504 @default.
- W2014920403 hasConcept C2984025587 @default.
- W2014920403 hasConcept C49040817 @default.
- W2014920403 hasConcept C520434653 @default.
- W2014920403 hasConcept C523214423 @default.
- W2014920403 hasConcept C71924100 @default.
- W2014920403 hasConcept C78434282 @default.
- W2014920403 hasConceptScore W2014920403C120665830 @default.
- W2014920403 hasConceptScore W2014920403C121332964 @default.
- W2014920403 hasConceptScore W2014920403C136525101 @default.
- W2014920403 hasConceptScore W2014920403C142724271 @default.
- W2014920403 hasConceptScore W2014920403C145667562 @default.
- W2014920403 hasConceptScore W2014920403C160671074 @default.
- W2014920403 hasConceptScore W2014920403C165013422 @default.
- W2014920403 hasConceptScore W2014920403C191897082 @default.
- W2014920403 hasConceptScore W2014920403C192562407 @default.
- W2014920403 hasConceptScore W2014920403C204787440 @default.
- W2014920403 hasConceptScore W2014920403C2777048131 @default.
- W2014920403 hasConceptScore W2014920403C2778386843 @default.
- W2014920403 hasConceptScore W2014920403C2779188808 @default.
- W2014920403 hasConceptScore W2014920403C2780064504 @default.
- W2014920403 hasConceptScore W2014920403C2984025587 @default.
- W2014920403 hasConceptScore W2014920403C49040817 @default.
- W2014920403 hasConceptScore W2014920403C520434653 @default.
- W2014920403 hasConceptScore W2014920403C523214423 @default.
- W2014920403 hasConceptScore W2014920403C71924100 @default.
- W2014920403 hasConceptScore W2014920403C78434282 @default.
- W2014920403 hasIssue "3" @default.
- W2014920403 hasLocation W20149204031 @default.
- W2014920403 hasLocation W20149204032 @default.
- W2014920403 hasOpenAccess W2014920403 @default.
- W2014920403 hasPrimaryLocation W20149204031 @default.
- W2014920403 hasRelatedWork W1599448956 @default.
- W2014920403 hasRelatedWork W1973456039 @default.
- W2014920403 hasRelatedWork W1982436220 @default.
- W2014920403 hasRelatedWork W2007773776 @default.
- W2014920403 hasRelatedWork W2031662089 @default.
- W2014920403 hasRelatedWork W2345254196 @default.
- W2014920403 hasRelatedWork W2527282588 @default.
- W2014920403 hasRelatedWork W2772858097 @default.
- W2014920403 hasRelatedWork W2897012686 @default.
- W2014920403 hasRelatedWork W4320812014 @default.
- W2014920403 hasVolume "27" @default.
- W2014920403 isParatext "false" @default.
- W2014920403 isRetracted "false" @default.
- W2014920403 magId "2014920403" @default.
- W2014920403 workType "article" @default.